Relationship between the mesoporous intermediate layer structure and the gas permeation property of an amorphous silica membrane synthesized by counter diffusion chemical vapor deposition

Takayuki Nagano, Shinji Fujisaki, Koji Sato, Koji Hataya, Yuji Iwamoto, Mikihiro Nomura, Shin Ichi Nakao

研究成果: Article

31 引用 (Scopus)

抄録

An amorphous silica membrane with an excellent hydrogen/nitrogen (H 2/N2) permselectivity of >10 000 and a He/H2 permselectivity of 11 was successfully synthesized on a γ-alumina (γ-Al2O3)-coated α-alumina (α-Al 2O3) porous support by counter diffusion chemical vapor deposition using tetramethylorthosilicate and oxygen at 873 K. An amorphous silica membrane possessed a high H2 permeance of >1.0 × 10-7 mol·(m2·s·Pa)-1 at ≥773 K. The dominant permeation mechanism for He and H2 at 373-873 K was activated diffusion. On the other hand, that for CO2, Ar, and N2 at 373-673 K was a viscous flow. At ≥673 K, that for CO 2, Ar, and N2 was activated diffusion. H2 permselectivity was markedly affected by the permeation temperature, thickness, and pore size of a γ-Al2O3 mesoporous intermediate layer.

元の言語English
ページ(範囲)71-76
ページ数6
ジャーナルJournal of the American Ceramic Society
91
発行部数1
DOI
出版物ステータスPublished - 2008 1

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Permeation
Silicon Dioxide
Chemical vapor deposition
Aluminum Oxide
Gases
Silica
Membranes
Alumina
Hydrogen
Viscous flow
Carbon Monoxide
Pore size
Nitrogen
Oxygen
Temperature

ASJC Scopus subject areas

  • Ceramics and Composites

これを引用

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abstract = "An amorphous silica membrane with an excellent hydrogen/nitrogen (H 2/N2) permselectivity of >10 000 and a He/H2 permselectivity of 11 was successfully synthesized on a γ-alumina (γ-Al2O3)-coated α-alumina (α-Al 2O3) porous support by counter diffusion chemical vapor deposition using tetramethylorthosilicate and oxygen at 873 K. An amorphous silica membrane possessed a high H2 permeance of >1.0 × 10-7 mol·(m2·s·Pa)-1 at ≥773 K. The dominant permeation mechanism for He and H2 at 373-873 K was activated diffusion. On the other hand, that for CO2, Ar, and N2 at 373-673 K was a viscous flow. At ≥673 K, that for CO 2, Ar, and N2 was activated diffusion. H2 permselectivity was markedly affected by the permeation temperature, thickness, and pore size of a γ-Al2O3 mesoporous intermediate layer.",
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AU - Nagano, Takayuki

AU - Fujisaki, Shinji

AU - Sato, Koji

AU - Hataya, Koji

AU - Iwamoto, Yuji

AU - Nomura, Mikihiro

AU - Nakao, Shin Ichi

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AB - An amorphous silica membrane with an excellent hydrogen/nitrogen (H 2/N2) permselectivity of >10 000 and a He/H2 permselectivity of 11 was successfully synthesized on a γ-alumina (γ-Al2O3)-coated α-alumina (α-Al 2O3) porous support by counter diffusion chemical vapor deposition using tetramethylorthosilicate and oxygen at 873 K. An amorphous silica membrane possessed a high H2 permeance of >1.0 × 10-7 mol·(m2·s·Pa)-1 at ≥773 K. The dominant permeation mechanism for He and H2 at 373-873 K was activated diffusion. On the other hand, that for CO2, Ar, and N2 at 373-673 K was a viscous flow. At ≥673 K, that for CO 2, Ar, and N2 was activated diffusion. H2 permselectivity was markedly affected by the permeation temperature, thickness, and pore size of a γ-Al2O3 mesoporous intermediate layer.

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