Reliability of damascene copper interconnects (Invited)

K.Ueno K.Ueno, T.Ishigamil T.Ishigamil, Y.Kakuhara Y.Kakuhara, M.Kawano M.Kawano, Kazuyoshi Ueno

研究成果: Article › 査読

本文言語	English
ページ（範囲）	408-418
ジャーナル	Proceedings of ULSI Process Integration IV
巻	2005
出版ステータス	Published - 2005 5月 1

引用スタイル

@article{4f49b152492d4279968112c69afac6ae,

title = "Reliability of damascene copper interconnects (Invited)",

author = "K.Ueno K.Ueno and T.Ishigamil T.Ishigamil and Y.Kakuhara Y.Kakuhara and M.Kawano M.Kawano and Kazuyoshi Ueno",

year = "2005",

month = may,

day = "1",

language = "English",

volume = "2005",

pages = "408--418",

journal = "Proceedings of ULSI Process Integration IV",

}