抄録
In this study, we demonstrated removal processing inside polydimethylsiloxane (PDMS) using a short-pulse laser without a photomask. As a light source, a passive Q-switched Nd:YAG laser was used, with a wavelength of 1064 nm and a pulse width of 500 ps.We fabricated micro cavities with a rectangular shape and complex three-dimensional structure. In addition, the fabricated cavity was cut with a cutter knife and the cross section was observed with scanning electron microscopy in order to investigate the processing characteristics in this experimental system. From the observation of the cavity's cross section, we found that the height was smaller than the design value and the upper wall was bent. We considered that thermal expansion during laser processing was the origin. By simulta-neously slowing down the stage moving speed and repetition rate, the degree of bending was able to be decreased. Although there was bending of the cross section, we fabricated cavities with a rectan-gular shape and a complex three-dimensional structure.
| 元の言語 | English |
|---|---|
| ページ（範囲） | 141-145 |
| ページ数 | 5 |
| ジャーナル | Journal of Laser Micro Nanoengineering |
| 巻 | 12 |
| 発行部数 | 2 |
| DOI | |
| 出版物ステータス | Published - 2017 1 1 |
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ASJC Scopus subject areas
- Instrumentation
- Industrial and Manufacturing Engineering
- Electrical and Electronic Engineering
これを引用
Removal processing inside PDMS by short pulse laser. / Hayashi, Katsuyuki; Matsuo, Shigeki.
：: Journal of Laser Micro Nanoengineering, 巻 12, 番号 2, 01.01.2017, p. 141-145.研究成果: Article
}
TY - JOUR
T1 - Removal processing inside PDMS by short pulse laser
AU - Hayashi, Katsuyuki
AU - Matsuo, Shigeki
PY - 2017/1/1
Y1 - 2017/1/1
N2 - In this study, we demonstrated removal processing inside polydimethylsiloxane (PDMS) using a short-pulse laser without a photomask. As a light source, a passive Q-switched Nd:YAG laser was used, with a wavelength of 1064 nm and a pulse width of 500 ps.We fabricated micro cavities with a rectangular shape and complex three-dimensional structure. In addition, the fabricated cavity was cut with a cutter knife and the cross section was observed with scanning electron microscopy in order to investigate the processing characteristics in this experimental system. From the observation of the cavity's cross section, we found that the height was smaller than the design value and the upper wall was bent. We considered that thermal expansion during laser processing was the origin. By simulta-neously slowing down the stage moving speed and repetition rate, the degree of bending was able to be decreased. Although there was bending of the cross section, we fabricated cavities with a rectan-gular shape and a complex three-dimensional structure.
AB - In this study, we demonstrated removal processing inside polydimethylsiloxane (PDMS) using a short-pulse laser without a photomask. As a light source, a passive Q-switched Nd:YAG laser was used, with a wavelength of 1064 nm and a pulse width of 500 ps.We fabricated micro cavities with a rectangular shape and complex three-dimensional structure. In addition, the fabricated cavity was cut with a cutter knife and the cross section was observed with scanning electron microscopy in order to investigate the processing characteristics in this experimental system. From the observation of the cavity's cross section, we found that the height was smaller than the design value and the upper wall was bent. We considered that thermal expansion during laser processing was the origin. By simulta-neously slowing down the stage moving speed and repetition rate, the degree of bending was able to be decreased. Although there was bending of the cross section, we fabricated cavities with a rectan-gular shape and a complex three-dimensional structure.
KW - 3D processing
KW - Internal processing
KW - Microchannel
KW - PDMS
KW - Sub-nanosecond laser
UR - http://www.scopus.com/inward/record.url?scp=85040969513&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85040969513&partnerID=8YFLogxK
U2 - 10.2961/jlmn.2017.02.0016
DO - 10.2961/jlmn.2017.02.0016
M3 - Article
AN - SCOPUS:85040969513
VL - 12
SP - 141
EP - 145
JO - Journal of Laser Micro Nanoengineering
JF - Journal of Laser Micro Nanoengineering
SN - 1880-0688
IS - 2
ER -