Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling

K. Mitsuishi, Masayuki Shimojo, M. Tanaka, M. Takeguchi, K. Furuya

研究成果: Conference contribution

抄録

A nanofabrication technique combining electron beam induced deposition (EBID) and low energy ion milling was demonstrated. A nanosized deposit fabricated by EBID forms a mask for successive low energy ion millings, so that the substrate region covered with the nanodeposit forms a nanostructure. Using a desired material as the substrate allows the production of any material by this method. The lateral size obtained was similar to the lateral size of the deposited mask which means that the size obtainable by the method is almost the same as the size of the deposit produced by EBID.

元の言語English
ホスト出版物のタイトルDigest of Papers - Microprocesses and Nanotechnology 2004
ページ118-119
ページ数2
出版物ステータスPublished - 2004
外部発表Yes
イベント2004 International Microprocesses and Nanotechnology Conference - Osaka
継続期間: 2004 10 262004 10 29

Other

Other2004 International Microprocesses and Nanotechnology Conference
Osaka
期間04/10/2604/10/29

Fingerprint

Nanotechnology
Electron beams
Masks
Ions
Deposits
Substrates
Nanostructures

ASJC Scopus subject areas

  • Engineering(all)

これを引用

Mitsuishi, K., Shimojo, M., Tanaka, M., Takeguchi, M., & Furuya, K. (2004). Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling. : Digest of Papers - Microprocesses and Nanotechnology 2004 (pp. 118-119)

Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling. / Mitsuishi, K.; Shimojo, Masayuki; Tanaka, M.; Takeguchi, M.; Furuya, K.

Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. p. 118-119.

研究成果: Conference contribution

Mitsuishi, K, Shimojo, M, Tanaka, M, Takeguchi, M & Furuya, K 2004, Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling. : Digest of Papers - Microprocesses and Nanotechnology 2004. pp. 118-119, 2004 International Microprocesses and Nanotechnology Conference, Osaka, 04/10/26.
Mitsuishi K, Shimojo M, Tanaka M, Takeguchi M, Furuya K. Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling. : Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. p. 118-119
Mitsuishi, K. ; Shimojo, Masayuki ; Tanaka, M. ; Takeguchi, M. ; Furuya, K. / Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling. Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. pp. 118-119
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