In this paper, we studied basic characteristics of the SAW propagation. When periodic micro structures were formed on the SAW transmission region, the propagation characteristics were dynamically changed. The prototype devices based on this analysis were fabricated and demonstrated. Conventional SAW elements were consisted of IDTs on the piezoelectric material and its transmitting frequency was just determined by the pitch of the IDTs. The periodic micro structures formed on the SAW transmission region can modulate the SAW propagation. Since periodic micro structures are controlled dynamically using the MEMS techniques, phase, frequency and transmitting power of the SAW can be modified.
|ジャーナル||Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C|
|出版物ステータス||Published - 2010 8|
ASJC Scopus subject areas
- Mechanics of Materials
- Mechanical Engineering
- Industrial and Manufacturing Engineering