Seed layer dependence of room-temperature recrystallization elecroplated copper films

K.Ueno K.Ueno, T.Ritzdorf T.Ritzdorf, S.Grace S.Grace, Kazuyoshi Ueno

研究成果: Article › 査読

引用スタイル

@article{45d3303e3bef4a02953c0d8a4f8b9b5c,

title = "Seed layer dependence of room-temperature recrystallization elecroplated copper films",

author = "K.Ueno K.Ueno and T.Ritzdorf T.Ritzdorf and S.Grace S.Grace and Kazuyoshi Ueno",

year = "1999",

month = nov,

day = "1",

language = "English",

volume = "86",

pages = "4930--4935",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

}