Selective drive of electrostatic actuators using remote inductive powering

S. Takeuchi, N. Futai, I. Shimoyama

研究成果査読

14 被引用数 (Scopus)

抄録

A remote inductive powering system for driving electrostatic actuators is proposed. The actuators can be controlled selectively by matching transmitter's frequency to the resonance frequency of the receiver LC-circuits. A 8.5 mm × 7.2 mm square and 20 turns planar coil are used as a receiver coil. The maximum output voltage of the receiver was measured about 45 V when a load resistance is more than 100 kΩ. A conventional electrostatic comb actuator was used for a prototype of the remote powering system. The coil and the actuator were fabricated on the same surface of a commercially available silicon on insulator (SOI) wafer. The displacement of the actuators were selectively controlled by changing the transmitter's frequency.

本文言語English
ページ574-577
ページ数4
出版ステータスPublished - 2001
外部発表はい
イベント14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) - Interlaken, Switzerland
継続期間: 2001 1 212001 1 25

Conference

Conference14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001)
国/地域Switzerland
CityInterlaken
Period01/1/2101/1/25

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 機械工学
  • 電子工学および電気工学

フィンガープリント

「Selective drive of electrostatic actuators using remote inductive powering」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル