Selective growth and characterization of nanostructures with transmission electron microscopes

M. Shimojo, S. Bysakh, K. Mitsuishi, M. Tanaka, M. Song, K. Furuya

研究成果: Article査読

8 被引用数 (Scopus)

抄録

A new type of electron beam-induced reactions is reported. Focused electron beams, the probe size of which is about 0.8 nm, were irradiated on carbon and Si substrates with an introduction of an aluminum trichloride or a gold trichloride gas in the chamber. Nanometer-sized carbon and Si rods were formed using carbon and Si substrates, respectively, by moving the beam position at a certain speed. As no aluminum, gold or chlorine was found in the rods, it is considered that chloride gases behaved as a sort of catalysis.

本文言語English
ページ(範囲)56-60
ページ数5
ジャーナルApplied Surface Science
241
1-2 SPEC. ISS.
DOI
出版ステータスPublished - 2005 2 28
外部発表はい

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 物理学および天文学(全般)
  • 表面および界面
  • 表面、皮膜および薄膜

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