TY - JOUR
T1 - Selective growth and characterization of nanostructures with transmission electron microscopes
AU - Shimojo, M.
AU - Bysakh, S.
AU - Mitsuishi, K.
AU - Tanaka, M.
AU - Song, M.
AU - Furuya, K.
PY - 2005/2/28
Y1 - 2005/2/28
N2 - A new type of electron beam-induced reactions is reported. Focused electron beams, the probe size of which is about 0.8 nm, were irradiated on carbon and Si substrates with an introduction of an aluminum trichloride or a gold trichloride gas in the chamber. Nanometer-sized carbon and Si rods were formed using carbon and Si substrates, respectively, by moving the beam position at a certain speed. As no aluminum, gold or chlorine was found in the rods, it is considered that chloride gases behaved as a sort of catalysis.
AB - A new type of electron beam-induced reactions is reported. Focused electron beams, the probe size of which is about 0.8 nm, were irradiated on carbon and Si substrates with an introduction of an aluminum trichloride or a gold trichloride gas in the chamber. Nanometer-sized carbon and Si rods were formed using carbon and Si substrates, respectively, by moving the beam position at a certain speed. As no aluminum, gold or chlorine was found in the rods, it is considered that chloride gases behaved as a sort of catalysis.
KW - Aluminum trichloride
KW - Catalysis
KW - Electron beam-induced reaction
KW - Nano-fabrication
UR - http://www.scopus.com/inward/record.url?scp=12244256138&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=12244256138&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2004.09.016
DO - 10.1016/j.apsusc.2004.09.016
M3 - Article
AN - SCOPUS:12244256138
SN - 0169-4332
VL - 241
SP - 56
EP - 60
JO - Applied Surface Science
JF - Applied Surface Science
IS - 1-2 SPEC. ISS.
ER -