Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide

Hideki Yokoi; Y. Shoji; T. Mizumoto

doi:10.1109/OMEMS.2003.1233474

Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide

Hideki Yokoi, Y. Shoji, T. Mizumoto

研究成果: Conference contribution

抄録

A magneto-optic waveguide with a semiconductor guiding layer was studied for an optical isolator employing a nonreciprocal phase shift. Freestanding structure of the waveguide was obtained by selective oxidation and successive wet etching.

本文言語	English
ホスト出版物のタイトル	2003 IEEE/LEOS International Conference on Optical MEMS
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	75-76
ページ数	2
ISBN（印刷版）	078037830X, 9780780378308
DOI	https://doi.org/10.1109/OMEMS.2003.1233474
出版ステータス	Published - 2003
外部発表	はい
イベント	2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States 継続期間: 2003 8月 18 → 2003 8月 21

Other

Other	2003 IEEE/LEOS International Conference on Optical MEMS
国/地域	United States
City	Waikoloa
Period	03/8/18 → 03/8/21

ASJC Scopus subject areas

工学（全般）

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10.1109/OMEMS.2003.1233474

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Yokoi, H, Shoji, Y & Mizumoto, T 2003, Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide. in 2003 IEEE/LEOS International Conference on Optical MEMS., 1233474, Institute of Electrical and Electronics Engineers Inc., pp. 75-76, 2003 IEEE/LEOS International Conference on Optical MEMS, Waikoloa, United States, 03/8/18. https://doi.org/10.1109/OMEMS.2003.1233474

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title = "Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide",

abstract = "A magneto-optic waveguide with a semiconductor guiding layer was studied for an optical isolator employing a nonreciprocal phase shift. Freestanding structure of the waveguide was obtained by selective oxidation and successive wet etching.",

keywords = "Electromagnetic waveguides, Isolators, Magnetooptic effects, Optical interferometry, Optical refraction, Optical surface waves, Optical variables control, Optical waveguides, Oxidation, Wet etching",

author = "Hideki Yokoi and Y. Shoji and T. Mizumoto",

year = "2003",

doi = "10.1109/OMEMS.2003.1233474",

language = "English",

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booktitle = "2003 IEEE/LEOS International Conference on Optical MEMS",

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AU - Yokoi, Hideki

AU - Shoji, Y.

AU - Mizumoto, T.

PY - 2003

Y1 - 2003

N2 - A magneto-optic waveguide with a semiconductor guiding layer was studied for an optical isolator employing a nonreciprocal phase shift. Freestanding structure of the waveguide was obtained by selective oxidation and successive wet etching.

AB - A magneto-optic waveguide with a semiconductor guiding layer was studied for an optical isolator employing a nonreciprocal phase shift. Freestanding structure of the waveguide was obtained by selective oxidation and successive wet etching.

KW - Electromagnetic waveguides

KW - Isolators

KW - Magnetooptic effects

KW - Optical interferometry

KW - Optical refraction

KW - Optical surface waves

KW - Optical variables control

KW - Optical waveguides

KW - Oxidation

KW - Wet etching

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DO - 10.1109/OMEMS.2003.1233474

M3 - Conference contribution

AN - SCOPUS:84946234361

SN - 078037830X

SN - 9780780378308

SP - 75

EP - 76

BT - 2003 IEEE/LEOS International Conference on Optical MEMS

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2003 IEEE/LEOS International Conference on Optical MEMS

Y2 - 18 August 2003 through 21 August 2003

ER -

Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide

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Other

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