Photonic crystal structures consisting of dielectric cylinders arranged in a honeycomb pattern were fabricated in silicon using electron-beam lithography and inductively-coupled plasma dry-etching. Lattice parameters of the fabricated structures (rod diameter ∼0.4 μm, distance between the centers of neighboring rods ∼0.85 μm, and rod height ∼5.2 μm) allowed to achieve and confirm experimentally the complete photonic band gap in vicinity of the optical communications wavelengths around 1.5 μm.
|ジャーナル||Journal of Applied Physics|
|出版ステータス||Published - 2004 12月 1|
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