Silicon-based honeycomb photonic crystal structures with complete photonic band gap at 1.5 μm wavelength

Jia Yu Ye, Shigeki Matsuo, Vygantas Mizeikis, Hiroaki Misawa

研究成果査読

16 被引用数 (Scopus)

抄録

Photonic crystal structures consisting of dielectric cylinders arranged in a honeycomb pattern were fabricated in silicon using electron-beam lithography and inductively-coupled plasma dry-etching. Lattice parameters of the fabricated structures (rod diameter ∼0.4 μm, distance between the centers of neighboring rods ∼0.85 μm, and rod height ∼5.2 μm) allowed to achieve and confirm experimentally the complete photonic band gap in vicinity of the optical communications wavelengths around 1.5 μm.

本文言語English
ページ(範囲)6934-6936
ページ数3
ジャーナルJournal of Applied Physics
96
11
DOI
出版ステータスPublished - 2004 12 1
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(全般)

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