Silicon-based honeycomb photonic crystal structures with complete photonic band gap at 1.5 μm wavelength

Jia Yu Ye, Shigeki Matsuo, Vygantas Mizeikis, Hiroaki Misawa

研究成果: Article査読

16 被引用数 (Scopus)

抄録

Photonic crystal structures consisting of dielectric cylinders arranged in a honeycomb pattern were fabricated in silicon using electron-beam lithography and inductively-coupled plasma dry-etching. Lattice parameters of the fabricated structures (rod diameter ∼0.4 μm, distance between the centers of neighboring rods ∼0.85 μm, and rod height ∼5.2 μm) allowed to achieve and confirm experimentally the complete photonic band gap in vicinity of the optical communications wavelengths around 1.5 μm.

本文言語English
ページ(範囲)6934-6936
ページ数3
ジャーナルJournal of Applied Physics
96
11
DOI
出版ステータスPublished - 2004 12月 1
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(全般)

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