Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS

Nobuyuki Futai, Kiyoshi Matsumoto, Isao Shimoyama

研究成果査読

1 被引用数 (Scopus)

抄録

A micromachined planar spiral inductor was created for the use of a passive mechanoreceptor element in a practical skin-like tactile sensor. The first version of the element was previously reported [1]. This paper shows the results of a simulation of the receptor element that changes inductance when largely deformed. We also report a modified method of fabrication and improves durability dramatically. Finally, we evaluated the validation of the simulation method.

本文言語English
ページ206-209
ページ数4
出版ステータスPublished - 2003
外部発表はい
イベントIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan
継続期間: 2003 1 192003 1 23

Conference

ConferenceIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
国/地域Japan
CityKyoto
Period03/1/1903/1/23

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 機械工学
  • 電子工学および電気工学

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