Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS

Nobuyuki Futai, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Conference contribution

1 引用 (Scopus)

抄録

A micromachined planar spiral inductor was created for the use of a passive mechanoreceptor element in a practical skin-like tactile sensor. The first version of the element was previously reported [1]. This paper shows the results of a simulation of the receptor element that changes inductance when largely deformed. We also report a modified method of fabrication and improves durability dramatically. Finally, we evaluated the validation of the simulation method.

元の言語English
ホスト出版物のタイトルProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
ページ206-209
ページ数4
出版物ステータスPublished - 2003
外部発表Yes
イベントIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto
継続期間: 2003 1 192003 1 23

Other

OtherIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
Kyoto
期間03/1/1903/1/23

Fingerprint

Inductance
Skin
Durability
Fabrication
Sensors

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

これを引用

Futai, N., Matsumoto, K., & Shimoyama, I. (2003). Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS. : Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 206-209)

Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS. / Futai, Nobuyuki; Matsumoto, Kiyoshi; Shimoyama, Isao.

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2003. p. 206-209.

研究成果: Conference contribution

Futai, N, Matsumoto, K & Shimoyama, I 2003, Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS. : Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). pp. 206-209, IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, 03/1/19.
Futai N, Matsumoto K, Shimoyama I. Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS. : Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2003. p. 206-209
Futai, Nobuyuki ; Matsumoto, Kiyoshi ; Shimoyama, Isao. / Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2003. pp. 206-209
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