Sm-doped Pb(Mg, Nb)O-PbTiO Sputter-Epitaxy on Si towards Giant-Piezoelectric Thin Film for Mems

Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

Pb(Zr, Ti)O (PZT) has been the most widely utilized in piezoelectric Micro Electro Mechanical Systems (MEMS) actuator. However, the improvement of its piezoelectricity has been saturated recently. Thus, we have developed Sm-doped Pb(Mg, Nb)O3-PbTiO (Sm-PMN-PT) epitaxial thin film as a next-generation piezoelectric thin film beyond PZT. In this study, a (001)/(100)-oriented Sm-PMN-PT with the pure perovskite phase was successfully sputter-deposited on a Si substrate using an epitaxial PZT buffer layer. The transverse piezoelectric coefficient, |e|, of a 1.5-gm-thick Sm-PMN-PT/PZT stack film measured over 20 C/m, which is equivalent to or better than those of the best class PZT thin films. From this result, the influence of the PZT buffer layer was deembedded, and |e| of the sole Sm-PMN-PT thin film was estimated at higher than 26 C/m. This result suggests a potential of epitaxial Sm-PMN-PT for high-performance piezo-MEMS.

本文言語English
ホスト出版物のタイトル34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
出版社Institute of Electrical and Electronics Engineers Inc.
ページ654-657
ページ数4
ISBN(電子版)9781665419123
DOI
出版ステータスPublished - 2021 1月 25
外部発表はい
イベント34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, United States
継続期間: 2021 1月 252021 1月 29

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2021-January
ISSN(印刷版)1084-6999

Conference

Conference34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
国/地域United States
CityVirtual, Gainesville
Period21/1/2521/1/29

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

フィンガープリント

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