SMA micro pump chip to flow liquids and gases

Koji Ikuta, Tadahiro Hasegawa, Takao Adachi

研究成果: Conference contribution

1 引用 (Scopus)

抜粋

This paper describes SMA micro pump chip with high performance. This chip can flow not only liquids but also gases (12μl/min., 25kPa for water, 11μl/min., 5kPa for air). Moreover, the micro pump is tolerant of gas bubbles in the liquid chamber and it is possible to prime by itself. To achieve this performance, the micro pump improved three elements. The first one is eliminating pressure loss of the check valves. The second one is optimizing flow pattern inside the deformable chamber. And the third one is increasing compressibility of the deformable chamber. The micro pump chip was fabricated using our original method of hybrid micro stereo lithography (hybrid-IH process). Therefore, their packaging without leakage was made successfully.

元の言語English
ホスト出版物のタイトルSMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies
ページ343-350
ページ数8
DOI
出版物ステータスPublished - 2008 12 1
外部発表Yes
イベントInternational Conference on Shape Memory and Superelastic Technologies, SMST-2007 - Tsukuba, Japan
継続期間: 2007 12 22007 12 5

出版物シリーズ

名前SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies

Conference

ConferenceInternational Conference on Shape Memory and Superelastic Technologies, SMST-2007
Japan
Tsukuba
期間07/12/207/12/5

ASJC Scopus subject areas

  • Mechanics of Materials

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  • これを引用

    Ikuta, K., Hasegawa, T., & Adachi, T. (2008). SMA micro pump chip to flow liquids and gases. : SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies (pp. 343-350). (SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies). https://doi.org/10.1361/cp2007sms343