Sma micro switching valve chip for biochemical ic family

Koji Ikuta, Tadahiro Hasegawa, Takao Adachi

研究成果: Conference contribution

抄録

This paper describes the development of the micro switching valve chip, which are actuated by SMA micro actuator. This micro switching valve uses only one built-in SMA micro actuator to switch among two outlets. The switching time at the active phase was faster than 0.5 sec. All parts such as the silicone rubber, the SMA micro actuator and a spacer were inserted during the fabrication of the switching valve using our original method of hybrid micro stereo lithography, thereby eliminating the need for micro assembly and bonding. In addition, basic performance of the switching valve chip was verified experimentally, using simple total reactor system which was constructed by stacking up the switching valve chip and other biochemical IC chips.

本文言語English
ホスト出版物のタイトルSMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies
ページ351-358
ページ数8
DOI
出版ステータスPublished - 2008 12 1
外部発表はい
イベントInternational Conference on Shape Memory and Superelastic Technologies, SMST-2007 - Tsukuba, Japan
継続期間: 2007 12 22007 12 5

出版物シリーズ

名前SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies

Conference

ConferenceInternational Conference on Shape Memory and Superelastic Technologies, SMST-2007
国/地域Japan
CityTsukuba
Period07/12/207/12/5

ASJC Scopus subject areas

  • 材料力学

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