Sma micro switching valve chip for biochemical ic family

Koji Ikuta, Tadahiro Hasegawa, Takao Adachi

研究成果: Conference contribution

抜粋

This paper describes the development of the micro switching valve chip, which are actuated by SMA micro actuator. This micro switching valve uses only one built-in SMA micro actuator to switch among two outlets. The switching time at the active phase was faster than 0.5 sec. All parts such as the silicone rubber, the SMA micro actuator and a spacer were inserted during the fabrication of the switching valve using our original method of hybrid micro stereo lithography, thereby eliminating the need for micro assembly and bonding. In addition, basic performance of the switching valve chip was verified experimentally, using simple total reactor system which was constructed by stacking up the switching valve chip and other biochemical IC chips.

元の言語English
ホスト出版物のタイトルSMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies
ページ351-358
ページ数8
DOI
出版物ステータスPublished - 2008 12 1
イベントInternational Conference on Shape Memory and Superelastic Technologies, SMST-2007 - Tsukuba, Japan
継続期間: 2007 12 22007 12 5

出版物シリーズ

名前SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies

Conference

ConferenceInternational Conference on Shape Memory and Superelastic Technologies, SMST-2007
Japan
Tsukuba
期間07/12/207/12/5

ASJC Scopus subject areas

  • Mechanics of Materials

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  • これを引用

    Ikuta, K., Hasegawa, T., & Adachi, T. (2008). Sma micro switching valve chip for biochemical ic family. : SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies (pp. 351-358). (SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies). https://doi.org/10.1361/cp2007smst351