TY - JOUR
T1 - Spectroscopic ellipsometry analysis of multilayered TiO2-Ag thin films for photochromic application
AU - Miao, L.
AU - Jiang, T.
AU - Tanemura, S.
AU - Tanemura, M.
AU - Nabatova-Gabain, N.
AU - Xu, G.
PY - 2008
Y1 - 2008
N2 - By altering the surrounding media of metal particles, the wavelength of surface plasma resonance can be tailored, which offers the potential for utilizing of plasma resonance related phenomenon, such as photochromism. Both sandwiched (TiO2/Ag/TiO2) and overcoated (TiO 2/Ag) films with different thicknesses were deposited on quartz substrate by rf helicon magnetron sputtering method. The structure of multi-layered TiO2-Ag films and the concentration of loaded metal Ag in each layer were determined by spectroscopic ellipsometry in high accuracy. The spectral dependent dielectric functions of each layer were obtained, which exhibited typical semiconductor TiO2, metal Ag and mixture TiO 2-Ag behaviors, respectively. The surface plasma resonance peak was observed for several extremely thin mixture layers. The apparent redshift of SPR peak from 700 nm to 780 nm was happened with increasing of Ag amount from 35% to 50%. The broadening of SPR peak was found for layer 3 in sample 1 with low concentration Ag embedded in TiO2 media.
AB - By altering the surrounding media of metal particles, the wavelength of surface plasma resonance can be tailored, which offers the potential for utilizing of plasma resonance related phenomenon, such as photochromism. Both sandwiched (TiO2/Ag/TiO2) and overcoated (TiO 2/Ag) films with different thicknesses were deposited on quartz substrate by rf helicon magnetron sputtering method. The structure of multi-layered TiO2-Ag films and the concentration of loaded metal Ag in each layer were determined by spectroscopic ellipsometry in high accuracy. The spectral dependent dielectric functions of each layer were obtained, which exhibited typical semiconductor TiO2, metal Ag and mixture TiO 2-Ag behaviors, respectively. The surface plasma resonance peak was observed for several extremely thin mixture layers. The apparent redshift of SPR peak from 700 nm to 780 nm was happened with increasing of Ag amount from 35% to 50%. The broadening of SPR peak was found for layer 3 in sample 1 with low concentration Ag embedded in TiO2 media.
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U2 - 10.1002/pssc.200777759
DO - 10.1002/pssc.200777759
M3 - Conference article
AN - SCOPUS:77951131857
VL - 5
SP - 1125
EP - 1128
JO - Physica Status Solidi C: Conferences
JF - Physica Status Solidi C: Conferences
SN - 1862-6351
IS - 5
T2 - 4th International Conference on Spectroscopic Ellipsometry, ICSE4
Y2 - 11 June 2007 through 15 June 2007
ER -