Spectroscopic ellipsometry analysis of multilayered TiO2-Ag thin films for photochromic application

L. Miao, T. Jiang, S. Tanemura, M. Tanemura, N. Nabatova-Gabain, G. Xu

研究成果: Conference article査読

2 被引用数 (Scopus)


By altering the surrounding media of metal particles, the wavelength of surface plasma resonance can be tailored, which offers the potential for utilizing of plasma resonance related phenomenon, such as photochromism. Both sandwiched (TiO2/Ag/TiO2) and overcoated (TiO 2/Ag) films with different thicknesses were deposited on quartz substrate by rf helicon magnetron sputtering method. The structure of multi-layered TiO2-Ag films and the concentration of loaded metal Ag in each layer were determined by spectroscopic ellipsometry in high accuracy. The spectral dependent dielectric functions of each layer were obtained, which exhibited typical semiconductor TiO2, metal Ag and mixture TiO 2-Ag behaviors, respectively. The surface plasma resonance peak was observed for several extremely thin mixture layers. The apparent redshift of SPR peak from 700 nm to 780 nm was happened with increasing of Ag amount from 35% to 50%. The broadening of SPR peak was found for layer 3 in sample 1 with low concentration Ag embedded in TiO2 media.

ジャーナルPhysica Status Solidi (C) Current Topics in Solid State Physics
出版ステータスPublished - 2008
イベント4th International Conference on Spectroscopic Ellipsometry, ICSE4 - Stockholm, Sweden
継続期間: 2007 6月 112007 6月 15

ASJC Scopus subject areas

  • 凝縮系物理学


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