Spontaneous formation of 10-μm-scale periodic patterns in transverse-scanning femtosecond laser processing

Shigeki Matsuo, Shuichi Hashimoto

研究成果: Article

7 引用 (Scopus)

抄録

We report spontaneous formation of 10-μm-scale periodic patterns in transverse-scanning femtosecond (fs) laser processing inside a glass substrate. The formation of the periodic patterns was critically dependent on the distance of the focus from the back surface; they formed only when fs pulses were focused slightly inside (∼ a few micrometers) from the back surface. The periods ranged from 7 to 16 μm, which is much longer than the distance between neighboring irradiation spots (0.1-1 μm in the present experiments), the diameter of the individual modified spots (about 2 μm), and the wavelength (0.8 μm). The patterns formed without any intentional modulation; just by scanning the sample at a constant speed during irradiation of fs laser pulses. The dependence on scanning speed and repetition rate of the laser were also investigated, and a possible formation scenario for this "long" periodic pattern was described.

元の言語English
ページ(範囲)165-171
ページ数7
ジャーナルOptics Express
23
発行部数1
DOI
出版物ステータスPublished - 2015 1 12

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scanning
lasers
irradiation
pulses
micrometers
repetition
modulation
glass
wavelengths

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

これを引用

Spontaneous formation of 10-μm-scale periodic patterns in transverse-scanning femtosecond laser processing. / Matsuo, Shigeki; Hashimoto, Shuichi.

:: Optics Express, 巻 23, 番号 1, 12.01.2015, p. 165-171.

研究成果: Article

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