抄録
We report spontaneous formation of 10-μm-scale periodic patterns in transverse-scanning femtosecond (fs) laser processing inside a glass substrate. The formation of the periodic patterns was critically dependent on the distance of the focus from the back surface; they formed only when fs pulses were focused slightly inside (∼ a few micrometers) from the back surface. The periods ranged from 7 to 16 μm, which is much longer than the distance between neighboring irradiation spots (0.1-1 μm in the present experiments), the diameter of the individual modified spots (about 2 μm), and the wavelength (0.8 μm). The patterns formed without any intentional modulation; just by scanning the sample at a constant speed during irradiation of fs laser pulses. The dependence on scanning speed and repetition rate of the laser were also investigated, and a possible formation scenario for this "long" periodic pattern was described.
| 元の言語 | English |
|---|---|
| ページ（範囲） | 165-171 |
| ページ数 | 7 |
| ジャーナル | Optics Express |
| 巻 | 23 |
| 発行部数 | 1 |
| DOI | |
| 出版物ステータス | Published - 2015 1 12 |
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ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
これを引用
Spontaneous formation of 10-μm-scale periodic patterns in transverse-scanning femtosecond laser processing. / Matsuo, Shigeki; Hashimoto, Shuichi.
：: Optics Express, 巻 23, 番号 1, 12.01.2015, p. 165-171.研究成果: Article
}
TY - JOUR
T1 - Spontaneous formation of 10-μm-scale periodic patterns in transverse-scanning femtosecond laser processing
AU - Matsuo, Shigeki
AU - Hashimoto, Shuichi
PY - 2015/1/12
Y1 - 2015/1/12
N2 - We report spontaneous formation of 10-μm-scale periodic patterns in transverse-scanning femtosecond (fs) laser processing inside a glass substrate. The formation of the periodic patterns was critically dependent on the distance of the focus from the back surface; they formed only when fs pulses were focused slightly inside (∼ a few micrometers) from the back surface. The periods ranged from 7 to 16 μm, which is much longer than the distance between neighboring irradiation spots (0.1-1 μm in the present experiments), the diameter of the individual modified spots (about 2 μm), and the wavelength (0.8 μm). The patterns formed without any intentional modulation; just by scanning the sample at a constant speed during irradiation of fs laser pulses. The dependence on scanning speed and repetition rate of the laser were also investigated, and a possible formation scenario for this "long" periodic pattern was described.
AB - We report spontaneous formation of 10-μm-scale periodic patterns in transverse-scanning femtosecond (fs) laser processing inside a glass substrate. The formation of the periodic patterns was critically dependent on the distance of the focus from the back surface; they formed only when fs pulses were focused slightly inside (∼ a few micrometers) from the back surface. The periods ranged from 7 to 16 μm, which is much longer than the distance between neighboring irradiation spots (0.1-1 μm in the present experiments), the diameter of the individual modified spots (about 2 μm), and the wavelength (0.8 μm). The patterns formed without any intentional modulation; just by scanning the sample at a constant speed during irradiation of fs laser pulses. The dependence on scanning speed and repetition rate of the laser were also investigated, and a possible formation scenario for this "long" periodic pattern was described.
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UR - http://www.scopus.com/inward/citedby.url?scp=84937210643&partnerID=8YFLogxK
U2 - 10.1364/OE.23.000165
DO - 10.1364/OE.23.000165
M3 - Article
AN - SCOPUS:84937210643
VL - 23
SP - 165
EP - 171
JO - Optics Express
JF - Optics Express
SN - 1094-4087
IS - 1
ER -