Sputter deposition and characterization of "epi-poly" Pb(Zr, Ti)O3 thin film on (100) Si substrate for MEMS applications

Yu Katsumata, Shinya Yoshida, Shuji Tanaka

研究成果: Article査読

1 被引用数 (Scopus)

抄録

Monocrystalline Pb(Zr, Ti)O3 (mono-PZT) thin films are suitable for specific microelectromechanical systems applications. However, these films are more brittle than general polycrystalline PZT thin films. Herein, we focus on an epitaxial PZT thin film with multiple variants in the in-plane direction. Such a unique crystalline structure is expected to have properties intermediate between the mono- and polycrystalline PZT thin films. Such a film is called as "epi-poly"thin film in this paper. We formed an LaNiO3 buffer layer with three variants as an underlayer. PZT was then sputter-deposited onto it. Thus, a (100)-oriented epi-poly PZT thin film with three variants was obtained. Its piezoelectricity, le31,fl, dielectric constant, ∈r33, dielectric loss, and tanδ were measured to be approximately 9 C m-2, 750-800, and 0.02, respectively. Nano-indentation tests on the epi-poly and mono- PZT thin films indicated that the former had superior mechanical robustness than that of the latter.

本文言語English
論文番号101005
ジャーナルJapanese Journal of Applied Physics
60
10
DOI
出版ステータスPublished - 2021 10月
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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