Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation

Saulius Juodkazis, Makoto Horyama, Masafumi Miwa, Mitsuru Watanabe, Andrius Marcinkevičius, Vygantas Mizeikis, Shigeki Matsuo, Hiroaki Misawa

研究成果: Conference article査読

10 被引用数 (Scopus)

抄録

We review applications of photopolymerization and photodamage by tightly focused picosecond and femtosecond pulses for the formation of three-dimensional structures. Laser microfabrication of various structures, like surface gratings, 3D optical memory, 2D and 3D photonic crystals, 3D micro-fluidic systems, etc. are described. Microfabrication by laser irradiation provides new opportunities to realize microstructures and microdevices, highly demanded in a number of fields, e.g., microchemistry, information storage, and photonics. The background of this technique is very simple, and relies on modification of materials by intense, strongly focused laser irradiation. In this highly spatially localized region, the material may become destroyed, solidified from liquid, or otherwise photo-modified, and complex structures can be formed from many photomodified regions. Below, we describe techniques, applications, and achievements of laser microstructuring in liquid resins and solid silica glasses.

本文言語English
ページ(範囲)27-38
ページ数12
ジャーナルProceedings of SPIE - The International Society for Optical Engineering
4644
DOI
出版ステータスPublished - 2002
外部発表はい
イベントSeventh International Conference on Laser and Laser-Information Technologies - Suzdal, Russian Federation
継続期間: 2001 6 202001 6 26

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

フィンガープリント

「Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル