Structural and compositional characterization of N 2 -H 2 plasma surface-treated TiO 2 thin films

L. Miao, S. Tanemura, H. Watanabe, S. Toh, K. Kaneko

研究成果: Conference article査読

12 被引用数 (Scopus)


The structural and compositional properties of three samples such as as-deposited single-phase anatase-TiO 2 polycrystalline thin films on slide glass substrates (No. 1), the sample surface-treated by N 2 -H 2 mixed-gases plasma (No. 2), and the sample being additionally anneal-treated in N 2 gases (No. 3), are characterized by transmission electron microscopy (TEM) and energy dispersive X-ray spectroscopy (EDS). The primitive lattice cells of three thin films are verified as distorted in comparison with that of bulk from the TEM results. This distortion of primitive lattice cell causes the increase of optical band gap for the films when we compared it with that of bulk, while the decrease of optical band gap should be attributed to the substitution of N into TiO 2 . Higher concentration of nitrogen in sample No. 3 is confirmed by line-EDS profiles under scanning TEM (STEM) when compared with sample No. 2 and this confirms that plasma surface treatment is an effective way for N-doping in TiO 2 .

ジャーナルApplied Surface Science
出版ステータスPublished - 2005 5月 15
イベント12th International Conference on Solid Films and Surfaces - Hammatsu, Japan
継続期間: 2004 6月 212004 6月 25

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 物理学および天文学(全般)
  • 表面および界面
  • 表面、皮膜および薄膜


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