Study of Gas Sensor based on Adsorption Heat Measurement Using Y-cut Quartz Crystal Microbalance

Atsushi Saitoh, Yukihiro Asari, Tooru Nomura

研究成果: Conference contribution

3 引用 (Scopus)

抄録

In this paper, we describe the gas sensor using Y-cut quartz resonator. The sensor response property is decided not only the mass loading effect, but also the heat of adsorption caused when the gas molecule is adsorbed. This type of sensor has a response characteristic different from the conventional sensors using AT-cut resonator that is stable against temperature change around room temperature, even if the gas molecule adsorption characteristic on the surface of the sensor is the same.

元の言語English
ホスト出版物のタイトルProceedings of IEEE Sensors
ページ435-438
ページ数4
1
エディション1
出版物ステータスPublished - 2002
イベントFirst IEEE International Conference on Sensors - IEEE Sensors 2002 - Orlando, FL
継続期間: 2002 6 122002 6 14

Other

OtherFirst IEEE International Conference on Sensors - IEEE Sensors 2002
Orlando, FL
期間02/6/1202/6/14

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Thermal variables measurement
Quartz crystal microbalances
Chemical sensors
Adsorption
Sensors
Resonators
Molecules
Gases
Quartz
Temperature

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

これを引用

Saitoh, A., Asari, Y., & Nomura, T. (2002). Study of Gas Sensor based on Adsorption Heat Measurement Using Y-cut Quartz Crystal Microbalance. : Proceedings of IEEE Sensors (1 版, 巻 1, pp. 435-438)

Study of Gas Sensor based on Adsorption Heat Measurement Using Y-cut Quartz Crystal Microbalance. / Saitoh, Atsushi; Asari, Yukihiro; Nomura, Tooru.

Proceedings of IEEE Sensors. 巻 1 1. 編 2002. p. 435-438.

研究成果: Conference contribution

Saitoh, A, Asari, Y & Nomura, T 2002, Study of Gas Sensor based on Adsorption Heat Measurement Using Y-cut Quartz Crystal Microbalance. : Proceedings of IEEE Sensors. 1 Edn, 巻. 1, pp. 435-438, First IEEE International Conference on Sensors - IEEE Sensors 2002, Orlando, FL, 02/6/12.
Saitoh A, Asari Y, Nomura T. Study of Gas Sensor based on Adsorption Heat Measurement Using Y-cut Quartz Crystal Microbalance. : Proceedings of IEEE Sensors. 1 版 巻 1. 2002. p. 435-438
Saitoh, Atsushi ; Asari, Yukihiro ; Nomura, Tooru. / Study of Gas Sensor based on Adsorption Heat Measurement Using Y-cut Quartz Crystal Microbalance. Proceedings of IEEE Sensors. 巻 1 1. 版 2002. pp. 435-438
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