Study of Gas Sensor based on Adsorption Heat Measurement Using Y-cut Quartz Crystal Microbalance

Atsushi Saitoh, Yukihiro Asari, Tooru Nomura

研究成果: Paper査読

3 被引用数 (Scopus)

抄録

In this paper, we describe the gas sensor using Y-cut quartz resonator. The sensor response property is decided not only the mass loading effect, but also the heat of adsorption caused when the gas molecule is adsorbed. This type of sensor has a response characteristic different from the conventional sensors using AT-cut resonator that is stable against temperature change around room temperature, even if the gas molecule adsorption characteristic on the surface of the sensor is the same.

本文言語English
ページ435-438
ページ数4
出版ステータスPublished - 2002 12 1
イベントFirst IEEE International Conference on Sensors - IEEE Sensors 2002 - Orlando, FL, United States
継続期間: 2002 6 122002 6 14

Conference

ConferenceFirst IEEE International Conference on Sensors - IEEE Sensors 2002
国/地域United States
CityOrlando, FL
Period02/6/1202/6/14

ASJC Scopus subject areas

  • 電子工学および電気工学

フィンガープリント

「Study of Gas Sensor based on Adsorption Heat Measurement Using Y-cut Quartz Crystal Microbalance」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル