Study of Gas Sensor based on Adsorption Heat Measurement Using Y-cut Quartz Crystal Microbalance

Atsushi Saitoh, Yukihiro Asari, Tooru Nomura

研究成果: Paper

3 引用 (Scopus)

抜粋

In this paper, we describe the gas sensor using Y-cut quartz resonator. The sensor response property is decided not only the mass loading effect, but also the heat of adsorption caused when the gas molecule is adsorbed. This type of sensor has a response characteristic different from the conventional sensors using AT-cut resonator that is stable against temperature change around room temperature, even if the gas molecule adsorption characteristic on the surface of the sensor is the same.

元の言語English
ページ435-438
ページ数4
出版物ステータスPublished - 2002 12 1
イベントFirst IEEE International Conference on Sensors - IEEE Sensors 2002 - Orlando, FL, United States
継続期間: 2002 6 122002 6 14

Conference

ConferenceFirst IEEE International Conference on Sensors - IEEE Sensors 2002
United States
Orlando, FL
期間02/6/1202/6/14

    フィンガープリント

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

これを引用

Saitoh, A., Asari, Y., & Nomura, T. (2002). Study of Gas Sensor based on Adsorption Heat Measurement Using Y-cut Quartz Crystal Microbalance. 435-438. 論文発表場所 First IEEE International Conference on Sensors - IEEE Sensors 2002, Orlando, FL, United States.