In this paper, we describe the gas sensor using Y-cut quartz resonator. The sensor response property is decided not only the mass loading effect, but also the heat of adsorption caused when the gas molecule is adsorbed. This type of sensor has a response characteristic different from the conventional sensors using AT-cut resonator that is stable against temperature change around room temperature, even if the gas molecule adsorption characteristic on the surface of the sensor is the same.
|出版ステータス||Published - 2002 12 1|
|イベント||First IEEE International Conference on Sensors - IEEE Sensors 2002 - Orlando, FL, United States|
継続期間: 2002 6 12 → 2002 6 14
|Conference||First IEEE International Conference on Sensors - IEEE Sensors 2002|
|Period||02/6/12 → 02/6/14|
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