Study of PZT Thin Film Deposition

Katsuhiro Tanaka, Kazumasa Shibata, Shinya Ishikawa, Kenji Suita, Sumito Nagasawa, Hiroki Kuwano

研究成果: Article

元の言語English
ページ(範囲)45-46
ジャーナルProceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)
出版物ステータスPublished - 2010 6 29

これを引用

Study of PZT Thin Film Deposition. / Tanaka, Katsuhiro; Shibata, Kazumasa; Ishikawa, Shinya; Suita, Kenji; Nagasawa, Sumito; Kuwano, Hiroki.

:: Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010), 29.06.2010, p. 45-46.

研究成果: Article

Tanaka, Katsuhiro ; Shibata, Kazumasa ; Ishikawa, Shinya ; Suita, Kenji ; Nagasawa, Sumito ; Kuwano, Hiroki. / Study of PZT Thin Film Deposition. :: Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010). 2010 ; pp. 45-46.
@article{beb10bdd9c0f40b29a769e4fd725bdbe,
title = "Study of PZT Thin Film Deposition",
author = "Katsuhiro Tanaka and Kazumasa Shibata and Shinya Ishikawa and Kenji Suita and Sumito Nagasawa and Hiroki Kuwano",
year = "2010",
month = "6",
day = "29",
language = "English",
pages = "45--46",
journal = "Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)",

}

TY - JOUR

T1 - Study of PZT Thin Film Deposition

AU - Tanaka, Katsuhiro

AU - Shibata, Kazumasa

AU - Ishikawa, Shinya

AU - Suita, Kenji

AU - Nagasawa, Sumito

AU - Kuwano, Hiroki

PY - 2010/6/29

Y1 - 2010/6/29

M3 - Article

SP - 45

EP - 46

JO - Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)

JF - Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)

ER -