Super-resolution image reconstruction is a digital signal processing technique that allows creating a high-resolution image from multiple lowresolution images taken at slightly different positions. We introduce the super-resolution image reconstruction technique into electron holography for reconstructing phase images as follows: the studied specimen is shifted step-wise with a high-precision piezo holder, and a series of holograms is recorded. When the step size is not a multiple of the CCD pixel size, processing of the acquired series results in a higher pixel density and spatial resolution as compared to the phase image obtained with conventional holography. The final resolution exceeds the limit of the CCD pixel size divided by the magnification.
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