Suppression of leakage current and moisture absorption of La2O3 films with ultraviolet ozone post treatment

Y.Zhao Y.Zhao, K.Kita K.Kita, K.Kyuno K.Kyuno, A.Toriumi A.Toriumi, Kentaro Kyuno

研究成果: Article

元の言語	English
ジャーナル	Japanese Journal of Applied Physics Letters 46
出版物ステータス	Published - 2007 7 1

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title = "Suppression of leakage current and moisture absorption of La2O3 films with ultraviolet ozone post treatment",

author = "Y.Zhao Y.Zhao and K.Kita K.Kita and K.Kyuno K.Kyuno and A.Toriumi A.Toriumi and Kentaro Kyuno",

year = "2007",

month = "7",

day = "1",

language = "English",

journal = "Japanese Journal of Applied Physics Letters 46",

}

TY - JOUR

T1 - Suppression of leakage current and moisture absorption of La2O3 films with ultraviolet ozone post treatment

AU - Y.Zhao, Y.Zhao

AU - K.Kita, K.Kita

AU - K.Kyuno, K.Kyuno

AU - A.Toriumi, A.Toriumi

AU - Kyuno, Kentaro

PY - 2007/7/1

Y1 - 2007/7/1

M3 - Article

JO - Japanese Journal of Applied Physics Letters 46

JF - Japanese Journal of Applied Physics Letters 46

ER -