Surface acoustic wave vapor sensor using ultrathin multilayer films

T. Nomura, A. Saitoh, S. Furukawa

研究成果: Article査読

抄録

A surface acoustic wave (SAW) sensor incorporating an ultrathin selective film is presented. The ultrathin films were made by both self-assembled method and by Langmuir-Blodgett method. SAW delay lines coated with SA film and LB film has been used as vapor sensor. Rapid and totally reversible sensor responses were obtained by using the thin monolayer film.

本文言語English
ページ(範囲)1082-1085
ページ数4
ジャーナルProceedings of the Annual IEEE International Frequency Control Symposium
2
出版ステータスPublished - 1999 12 1

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 電子工学および電気工学

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