Surface Micromachining in Optical Isolator with Semiconductor Guiding Layer for Enhancement of Magnetooptic Effect

Hideki Yokoi, Tetsuya Mizumoto, Takashi Sakai, Takafumi Ohtsuka, Yoshiaki Nakano

研究成果: Article

2 引用 (Scopus)

抄録

A magnetooptic waveguide with a magnetic garnet/GaInAsP/air structure was effective in enhancing the magnetooptic effect. Surface micromachining was investigated for fabricating a magnetooptic waveguide in an optical isolator with a semiconductor guiding layer. As a preliminary experiment, a GaInAsP rib waveguide with an air cladding layer was fabricated by selective wet etching. The rib waveguide with a 1 -mm-long air bridge was successfully obtained on the GaInAsP guiding layer. Light waves could be guided in the GaInAsP waveguide with the air bridge structure.

元の言語English
ページ(範囲)5094-5097
ページ数4
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
42
発行部数8
出版物ステータスPublished - 2003 8
外部発表Yes

Fingerprint

Surface micromachining
Magnetooptical effects
isolators
micromachining
Waveguides
Semiconductor materials
waveguides
augmentation
air
Air
bridges (structures)
Wet etching
Garnets
garnets
etching
Experiments

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

これを引用

@article{6ce5181a5630484a8ee4ba3d95f11819,
title = "Surface Micromachining in Optical Isolator with Semiconductor Guiding Layer for Enhancement of Magnetooptic Effect",
abstract = "A magnetooptic waveguide with a magnetic garnet/GaInAsP/air structure was effective in enhancing the magnetooptic effect. Surface micromachining was investigated for fabricating a magnetooptic waveguide in an optical isolator with a semiconductor guiding layer. As a preliminary experiment, a GaInAsP rib waveguide with an air cladding layer was fabricated by selective wet etching. The rib waveguide with a 1 -mm-long air bridge was successfully obtained on the GaInAsP guiding layer. Light waves could be guided in the GaInAsP waveguide with the air bridge structure.",
keywords = "Air bridge, Magnetic gamet, Magnetooptic effect, Optical isolator, Surface micromachining",
author = "Hideki Yokoi and Tetsuya Mizumoto and Takashi Sakai and Takafumi Ohtsuka and Yoshiaki Nakano",
year = "2003",
month = "8",
language = "English",
volume = "42",
pages = "5094--5097",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "8",

}

TY - JOUR

T1 - Surface Micromachining in Optical Isolator with Semiconductor Guiding Layer for Enhancement of Magnetooptic Effect

AU - Yokoi, Hideki

AU - Mizumoto, Tetsuya

AU - Sakai, Takashi

AU - Ohtsuka, Takafumi

AU - Nakano, Yoshiaki

PY - 2003/8

Y1 - 2003/8

N2 - A magnetooptic waveguide with a magnetic garnet/GaInAsP/air structure was effective in enhancing the magnetooptic effect. Surface micromachining was investigated for fabricating a magnetooptic waveguide in an optical isolator with a semiconductor guiding layer. As a preliminary experiment, a GaInAsP rib waveguide with an air cladding layer was fabricated by selective wet etching. The rib waveguide with a 1 -mm-long air bridge was successfully obtained on the GaInAsP guiding layer. Light waves could be guided in the GaInAsP waveguide with the air bridge structure.

AB - A magnetooptic waveguide with a magnetic garnet/GaInAsP/air structure was effective in enhancing the magnetooptic effect. Surface micromachining was investigated for fabricating a magnetooptic waveguide in an optical isolator with a semiconductor guiding layer. As a preliminary experiment, a GaInAsP rib waveguide with an air cladding layer was fabricated by selective wet etching. The rib waveguide with a 1 -mm-long air bridge was successfully obtained on the GaInAsP guiding layer. Light waves could be guided in the GaInAsP waveguide with the air bridge structure.

KW - Air bridge

KW - Magnetic gamet

KW - Magnetooptic effect

KW - Optical isolator

KW - Surface micromachining

UR - http://www.scopus.com/inward/record.url?scp=0142075841&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0142075841&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0142075841

VL - 42

SP - 5094

EP - 5097

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 8

ER -