抄録
A magnetooptic waveguide with a magnetic garnet/GaInAsP/air structure was effective in enhancing the magnetooptic effect. Surface micromachining was investigated for fabricating a magnetooptic waveguide in an optical isolator with a semiconductor guiding layer. As a preliminary experiment, a GaInAsP rib waveguide with an air cladding layer was fabricated by selective wet etching. The rib waveguide with a 1 -mm-long air bridge was successfully obtained on the GaInAsP guiding layer. Light waves could be guided in the GaInAsP waveguide with the air bridge structure.
| 元の言語 | English |
|---|---|
| ページ（範囲） | 5094-5097 |
| ページ数 | 4 |
| ジャーナル | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| 巻 | 42 |
| 発行部数 | 8 |
| 出版物ステータス | Published - 2003 8 |
| 外部発表 | Yes |
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ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
これを引用
Surface Micromachining in Optical Isolator with Semiconductor Guiding Layer for Enhancement of Magnetooptic Effect. / Yokoi, Hideki; Mizumoto, Tetsuya; Sakai, Takashi; Ohtsuka, Takafumi; Nakano, Yoshiaki.
：: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 巻 42, 番号 8, 08.2003, p. 5094-5097.研究成果: Article
}
TY - JOUR
T1 - Surface Micromachining in Optical Isolator with Semiconductor Guiding Layer for Enhancement of Magnetooptic Effect
AU - Yokoi, Hideki
AU - Mizumoto, Tetsuya
AU - Sakai, Takashi
AU - Ohtsuka, Takafumi
AU - Nakano, Yoshiaki
PY - 2003/8
Y1 - 2003/8
N2 - A magnetooptic waveguide with a magnetic garnet/GaInAsP/air structure was effective in enhancing the magnetooptic effect. Surface micromachining was investigated for fabricating a magnetooptic waveguide in an optical isolator with a semiconductor guiding layer. As a preliminary experiment, a GaInAsP rib waveguide with an air cladding layer was fabricated by selective wet etching. The rib waveguide with a 1 -mm-long air bridge was successfully obtained on the GaInAsP guiding layer. Light waves could be guided in the GaInAsP waveguide with the air bridge structure.
AB - A magnetooptic waveguide with a magnetic garnet/GaInAsP/air structure was effective in enhancing the magnetooptic effect. Surface micromachining was investigated for fabricating a magnetooptic waveguide in an optical isolator with a semiconductor guiding layer. As a preliminary experiment, a GaInAsP rib waveguide with an air cladding layer was fabricated by selective wet etching. The rib waveguide with a 1 -mm-long air bridge was successfully obtained on the GaInAsP guiding layer. Light waves could be guided in the GaInAsP waveguide with the air bridge structure.
KW - Air bridge
KW - Magnetic gamet
KW - Magnetooptic effect
KW - Optical isolator
KW - Surface micromachining
UR - http://www.scopus.com/inward/record.url?scp=0142075841&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0142075841&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0142075841
VL - 42
SP - 5094
EP - 5097
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 8
ER -