Surface roughness assisted 100 kHz femtosecond laser induced nanostructure formation on silicon surface

Takuro Tomita, Ryota Kumai, Hidenori Nomura, Shigeki Matsuo, Shuichi Hashimoto, Ken Morita, Toshiro Isu

研究成果: Article

7 引用 (Scopus)

抜粋

Spontaneous nanostructure formations on roughened and smooth silicon surface by the femtosecond laser irradiation with the repetition rate of 100 kHz were systematically studied. In addition to the widely accepted so-called coarse ripple, which has the period analogous to the wavelength of the laser beam and aligns perpendicularly to the electric field of the incident laser beam, the ripple which has the period similar to the wavelength of the incident laser beam but aligns parallel to the electric field of the laser beam was observed on the roughened surface for the lower fluence and the higher number of pulse irradiation. Furthermore, the ensemble of dots formed by the enhancement of the local electric field was found on the roughened surface. This structure is preferentially formed around the scratches aligned perpendicularly to the electric field of the laser beam. These novel nanostructures are considered to be peculiar to the femtosecond laser irradiation and open the possibilities for precise control of the spontaneous nanostructure formation by femtosecond laser irradiation.

元の言語English
ページ(範囲)89-94
ページ数6
ジャーナルApplied Physics A: Materials Science and Processing
105
発行部数1
DOI
出版物ステータスPublished - 2011 10 1

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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