Synthesis and properties of tantalum oxide films by sol-gel method using photoirradiation

T.Ohishi T.Ohishi, S.Maekawa S.Maekawa, A.Katou A.Katou, Tomoji Oishi

研究成果: Article査読

本文言語English
ジャーナル6th International Workshop on Glasses and Ceramics from Gels (Sevilla, Spain)
出版ステータスPublished - 1991 10 1

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