Synthesis of nitrogen-doped multilayer graphene film by solid-phase deposition using Co-N catalyst

Yuki Fujishima, Kazuyoshi Ueno

研究成果: Conference contribution

抄録

A new process using a Co-N catalyst has been developed to perform doping simultaneously with film formation in solid phase deposition method (SPD) which does not require transfer of multilayer graphene (MLG). Nitrogen doping into MLG was confirmed by XPS and UPS and succeeded in reducing sheet resistance by about 36%.

本文言語English
ホスト出版物のタイトル2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019
出版社Institute of Electrical and Electronics Engineers Inc.
ページ354-356
ページ数3
ISBN(電子版)9781538665084
DOI
出版ステータスPublished - 2019 3
イベント2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019 - Singapore, Singapore
継続期間: 2019 3 122019 3 15

出版物シリーズ

名前2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019

Conference

Conference2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019
CountrySingapore
CitySingapore
Period19/3/1219/3/15

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Hardware and Architecture

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