TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors

M. Takeguchi, M. Shimojo, M. Tanaka, K. Mitsuishi, K. Furuya

研究成果: Conference contribution

フィンガープリント

「TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。