TEM sample preparation using a new nanofabrication technique combining electron-beam-induced deposition and low-energy ion milling

Kazutaka Mitsuishi, Masayuki Shimojo, Miyoko Tanaka, Masaki Takeguchi, Minghui Song, Kazuo Furuya

研究成果: Article査読

2 被引用数 (Scopus)

抄録

A new TEM sample preparation technique using electron-beam-induced deposition combined with low-energy ion milling was used to fabricate for two different shapes of sample, conical and plate. High-quality HREM images can be obtained from samples prepared by this technique. A desired sample position can be obtained with high accuracy, and the total sample preparation time can be much less than conventional techniques. Because the gas deposition system used can easily be integrated in a conventional SEM, the method can be performed in any laboratory equipped with a SEM and an ion milling machine.

本文言語English
ページ(範囲)545-548
ページ数4
ジャーナルMicroscopy and Microanalysis
12
6
DOI
出版ステータスPublished - 2006 12 1
外部発表はい

ASJC Scopus subject areas

  • 器械工学

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