The design and experiment of ion generator power supply for vacuum sputtering

Wen Guang Chen, Yi Hua Rao, Chang Hong Shan, Goro Fujita, Takemoto Yasutoshi

研究成果: Conference contribution

9 引用 (Scopus)

抜粋

A LCLC series-parallel high-frequency ac/ac resonant inverter configure for ion assistant vacuum-sputtering manufacture film is proposed. The characteristic of the sputtering chamber and a simplified steady-state analysis of the inverter, using complex circuit analysis, are presented. The control implementation circuit block diagram is introduced to the resonant inverter, which can implement the output current regulation and variable frequency operation simultaneity; the system stability benefits from this control method. It is suitable for the characteristic of chamber load, and the switching losses to be lower as much as possible in such large dynamic load. The 15 kW-30A prototype power supply is described, and experimental results are given.

元の言語English
ホスト出版物のタイトルFourth Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Conference Proceedings
ページ931-935
ページ数5
DOI
出版物ステータスPublished - 2007 10 1
イベント4th Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Nagoya, Japan
継続期間: 2007 4 22007 4 5

出版物シリーズ

名前Fourth Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Conference Proceedings

Conference

Conference4th Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007
Japan
Nagoya
期間07/4/207/4/5

ASJC Scopus subject areas

  • Energy(all)
  • Electrical and Electronic Engineering

フィンガープリント The design and experiment of ion generator power supply for vacuum sputtering' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用

    Chen, W. G., Rao, Y. H., Shan, C. H., Fujita, G., & Yasutoshi, T. (2007). The design and experiment of ion generator power supply for vacuum sputtering. : Fourth Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Conference Proceedings (pp. 931-935). [4239268] (Fourth Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Conference Proceedings). https://doi.org/10.1109/PCCON.2007.373078