TY - GEN
T1 - The design and experiment of ion generator power supply for vacuum sputtering
AU - Chen, Wen Guang
AU - Rao, Yi Hua
AU - Shan, Chang Hong
AU - Fujita, Goro
AU - Yasutoshi, Takemoto
PY - 2007/10/1
Y1 - 2007/10/1
N2 - A LCLC series-parallel high-frequency ac/ac resonant inverter configure for ion assistant vacuum-sputtering manufacture film is proposed. The characteristic of the sputtering chamber and a simplified steady-state analysis of the inverter, using complex circuit analysis, are presented. The control implementation circuit block diagram is introduced to the resonant inverter, which can implement the output current regulation and variable frequency operation simultaneity; the system stability benefits from this control method. It is suitable for the characteristic of chamber load, and the switching losses to be lower as much as possible in such large dynamic load. The 15 kW-30A prototype power supply is described, and experimental results are given.
AB - A LCLC series-parallel high-frequency ac/ac resonant inverter configure for ion assistant vacuum-sputtering manufacture film is proposed. The characteristic of the sputtering chamber and a simplified steady-state analysis of the inverter, using complex circuit analysis, are presented. The control implementation circuit block diagram is introduced to the resonant inverter, which can implement the output current regulation and variable frequency operation simultaneity; the system stability benefits from this control method. It is suitable for the characteristic of chamber load, and the switching losses to be lower as much as possible in such large dynamic load. The 15 kW-30A prototype power supply is described, and experimental results are given.
KW - Ion assistant sputtering
KW - Phase-shift PWM
KW - Resonant inverter
KW - Soft switching
UR - http://www.scopus.com/inward/record.url?scp=34748892344&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34748892344&partnerID=8YFLogxK
U2 - 10.1109/PCCON.2007.373078
DO - 10.1109/PCCON.2007.373078
M3 - Conference contribution
AN - SCOPUS:34748892344
SN - 142440844X
SN - 9781424408443
T3 - Fourth Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Conference Proceedings
SP - 931
EP - 935
BT - Fourth Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Conference Proceedings
T2 - 4th Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007
Y2 - 2 April 2007 through 5 April 2007
ER -