The effect of Substrate Surface Roughness on the Mechanical Properties od DLC Film Deposited by RF Magnetron Sputter Ion Plating from Woodceramics as Target

D. Kaewdook, A. Takasaki, T. Okabe

研究成果: Article

元の言語English
ジャーナルProc. 2nd TSME Intel. Conf. on Mechanical Engineering, 19-21 October, 2011, Krabi, Thailand
出版物ステータスPublished - 2011 10 1

これを引用

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title = "The effect of Substrate Surface Roughness on the Mechanical Properties od DLC Film Deposited by RF Magnetron Sputter Ion Plating from Woodceramics as Target",
author = "D. Kaewdook and A. Takasaki and T. Okabe",
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journal = "Proc. 2nd TSME Intel. Conf. on Mechanical Engineering, 19-21 October, 2011, Krabi, Thailand",

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AU - Okabe, T.

PY - 2011/10/1

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