The size dependence of the nano-dots formed by electron-beam-induced deposition on the partial pressure of the precursor

M. Tanaka, M. Shimojo, K. Mitsuishi, K. Furuya

研究成果: Article査読

53 被引用数 (Scopus)

抄録

We have successfully fabricated nano-dots containing W from a metal-organic gas source by electron-beam-induced deposition in an ultra-high vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size is less than 2 nm in diameter, which is the record smallest ever made by this method.

本文言語English
ページ(範囲)543-546
ページ数4
ジャーナルApplied Physics A: Materials Science and Processing
78
4
DOI
出版ステータスPublished - 2004 3 1
外部発表はい

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

フィンガープリント 「The size dependence of the nano-dots formed by electron-beam-induced deposition on the partial pressure of the precursor」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル