TY - JOUR
T1 - Thickness-dependent optical properties of ZnO thin films
AU - Miao, L.
AU - Tanemura, S.
AU - Tanemura, M.
AU - Lau, S. P.
AU - Tay, B. K.
N1 - Funding Information:
Acknowledgements This work is supported in part by grant from the NITECH 21st Century COE program for ‘‘World Ceramics Centre for Environmental Harmony’’.
PY - 2007/10
Y1 - 2007/10
N2 - Spectroscopic ellipsometry was employed to study the thickness dependence of the optical properties of ZnO thin films. ZnO thin films with a nominal thickness of 100, 200, and 400 nm were deposited by filtered cathodic vacuum arc (FCVA) method. The optical band gap showed a slight blue shift with respect to the bulk value with increasingly thicker ZnO films deposited on Si, while no shift with thickness could be observed for ZnO films deposited on a SiO 2/Si substrate, indicating a possible effect of the SiO 2 buffer layer on the film optical properties. The Urbach tail parameter E 0 increased as the film thickness is increased, indicating a decrease in the structural disorder with increasing film thickness.
AB - Spectroscopic ellipsometry was employed to study the thickness dependence of the optical properties of ZnO thin films. ZnO thin films with a nominal thickness of 100, 200, and 400 nm were deposited by filtered cathodic vacuum arc (FCVA) method. The optical band gap showed a slight blue shift with respect to the bulk value with increasingly thicker ZnO films deposited on Si, while no shift with thickness could be observed for ZnO films deposited on a SiO 2/Si substrate, indicating a possible effect of the SiO 2 buffer layer on the film optical properties. The Urbach tail parameter E 0 increased as the film thickness is increased, indicating a decrease in the structural disorder with increasing film thickness.
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U2 - 10.1007/s10854-007-9243-3
DO - 10.1007/s10854-007-9243-3
M3 - Article
AN - SCOPUS:34547597718
VL - 18
SP - 343
EP - 346
JO - Journal of Materials Science: Materials in Electronics
JF - Journal of Materials Science: Materials in Electronics
SN - 0957-4522
IS - SUPPL. 1
ER -