Three-dimensional imaging of carbon nanostructures by scanning confocal electron microscopy

Ayako Hashimoto, Masayuki Shimojo, Kazutaka Mitsuishi, Masaki Takeguchi

研究成果: Article査読

27 被引用数 (Scopus)

抄録

Although scanning confocal electron microscopy (SCEM) shows a promise for optical depth sectioning with high resolution, practical and theoretical problems have prevented its application to three-dimensional (3D) imaging. We employed a stage-scanning system in which only the specimen is moved three dimensionally under a fixed lens configuration, and an annular dark-field (ADF) aperture which blocks direct beams and selects only the scattered electrons. This ADF-SCEM improved depth resolution sufficiently to perform optical depth sectioning. Finally, we succeeded in demonstrating the 3D reconstruction of carbon nanocoils using ADF-SCEM.

本文言語English
論文番号086101
ジャーナルJournal of Applied Physics
106
8
DOI
出版ステータスPublished - 2009
外部発表はい

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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