Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Saulius Juodkazis, Koichi Nishimura, Hiroki Okuno, Yusuke Tabuchi, Shigeki Matsuo, Satoru Tanaka, Hiroaki Misawa

研究成果: Conference contribution

6 引用 (Scopus)

抜粋

We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.

元の言語English
ホスト出版物のタイトルInternational Conference on Lasers, Applications, and Technologies 2007
ホスト出版物のサブタイトルLaser-assisted Micro- and Nanotechnologies
DOI
出版物ステータスPublished - 2007 11 26
外部発表Yes
イベントInternational Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies - Minsk, Belarus
継続期間: 2007 5 282007 6 1

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
6732
ISSN(印刷物)0277-786X

Conference

ConferenceInternational Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies
Belarus
Minsk
期間07/5/2807/6/1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

フィンガープリント Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用

    Juodkazis, S., Nishimura, K., Okuno, H., Tabuchi, Y., Matsuo, S., Tanaka, S., & Misawa, H. (2007). Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. : International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies [67320B] (Proceedings of SPIE - The International Society for Optical Engineering; 巻数 6732). https://doi.org/10.1117/12.751889