Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Saulius Juodkazis; Koichi Nishimura; Hiroki Okuno; Yusuke Tabuchi; Shigeki Matsuo; Satoru Tanaka; Hiroaki Misawa

doi:10.1117/12.751889

Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Saulius Juodkazis, Koichi Nishimura, Hiroki Okuno, Yusuke Tabuchi, Shigeki Matsuo, Satoru Tanaka, Hiroaki Misawa

研究成果: Conference contribution

6 引用（Scopus）

抜粋

We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.

元の言語	English
ホスト出版物のタイトル	International Conference on Lasers, Applications, and Technologies 2007
ホスト出版物のサブタイトル	Laser-assisted Micro- and Nanotechnologies
DOI	https://doi.org/10.1117/12.751889
出版物ステータス	Published - 2007 11 26
外部発表	Yes
イベント	International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies - Minsk, Belarus 継続期間: 2007 5 28 → 2007 6 1

出版物シリーズ

名前	Proceedings of SPIE - The International Society for Optical Engineering
巻	6732
ISSN（印刷物）	0277-786X

Conference

Conference	International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies
国	Belarus
市	Minsk
期間	07/5/28 → 07/6/1

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

文献にアクセス

10.1117/12.751889

フィンガープリント Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

これを引用

Juodkazis, S., Nishimura, K., Okuno, H., Tabuchi, Y., Matsuo, S., Tanaka, S., & Misawa, H. (2007). Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. ： International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies [67320B] (Proceedings of SPIE - The International Society for Optical Engineering; 巻数 6732). https://doi.org/10.1117/12.751889

Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. / Juodkazis, Saulius; Nishimura, Koichi; Okuno, Hiroki; Tabuchi, Yusuke; Matsuo, Shigeki; Tanaka, Satoru; Misawa, Hiroaki.

International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies. 2007. 67320B (Proceedings of SPIE - The International Society for Optical Engineering; 巻 6732).

研究成果: Conference contribution

Juodkazis, S, Nishimura, K, Okuno, H, Tabuchi, Y, Matsuo, S, Tanaka, S & Misawa, H 2007, Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. ： International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies., 67320B, Proceedings of SPIE - The International Society for Optical Engineering, 巻. 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies, Minsk, Belarus, 07/5/28. https://doi.org/10.1117/12.751889

Juodkazis S, Nishimura K, Okuno H, Tabuchi Y, Matsuo S, Tanaka S その他. Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. ： International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies. 2007. 67320B. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.751889

Juodkazis, Saulius ; Nishimura, Koichi ; Okuno, Hiroki ; Tabuchi, Yusuke ; Matsuo, Shigeki ; Tanaka, Satoru ; Misawa, Hiroaki. / Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies. 2007. (Proceedings of SPIE - The International Society for Optical Engineering).

@inproceedings{e49fb38e4cb64308b95fa41470681379,

title = "Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics",

abstract = "We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.",

keywords = "Ablation, Dielectric breakdown, Field enhancement, Laser microfabrication, Light extraction, Ripples",

author = "Saulius Juodkazis and Koichi Nishimura and Hiroki Okuno and Yusuke Tabuchi and Shigeki Matsuo and Satoru Tanaka and Hiroaki Misawa",

year = "2007",

month = nov,

day = "26",

doi = "10.1117/12.751889",

language = "English",

isbn = "0819468908",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "International Conference on Lasers, Applications, and Technologies 2007",

note = "International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies ; Conference date: 28-05-2007 Through 01-06-2007",

}

TY - GEN

T1 - Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

AU - Juodkazis, Saulius

AU - Nishimura, Koichi

AU - Okuno, Hiroki

AU - Tabuchi, Yusuke

AU - Matsuo, Shigeki

AU - Tanaka, Satoru

AU - Misawa, Hiroaki

PY - 2007/11/26

Y1 - 2007/11/26

N2 - We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.

AB - We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.

KW - Ablation

KW - Dielectric breakdown

KW - Field enhancement

KW - Laser microfabrication

KW - Light extraction

KW - Ripples

UR - http://www.scopus.com/inward/record.url?scp=36248975205&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=36248975205&partnerID=8YFLogxK

U2 - 10.1117/12.751889

DO - 10.1117/12.751889

M3 - Conference contribution

AN - SCOPUS:36248975205

SN - 0819468908

SN - 9780819468901

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - International Conference on Lasers, Applications, and Technologies 2007

T2 - International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies

Y2 - 28 May 2007 through 1 June 2007

ER -