@inproceedings{e49fb38e4cb64308b95fa41470681379,
title = "Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics",
abstract = "We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.",
keywords = "Ablation, Dielectric breakdown, Field enhancement, Laser microfabrication, Light extraction, Ripples",
author = "Saulius Juodkazis and Koichi Nishimura and Hiroki Okuno and Yusuke Tabuchi and Shigeki Matsuo and Satoru Tanaka and Hiroaki Misawa",
year = "2007",
doi = "10.1117/12.751889",
language = "English",
isbn = "0819468908",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "International Conference on Lasers, Applications, and Technologies 2007",
note = "International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies ; Conference date: 28-05-2007 Through 01-06-2007",
}