Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Saulius Juodkazis, Koichi Nishimura, Hiroki Okuno, Yusuke Tabuchi, Shigeki Matsuo, Satoru Tanaka, Hiroaki Misawa

研究成果: Conference contribution

6 被引用数 (Scopus)

抄録

We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.

本文言語English
ホスト出版物のタイトルInternational Conference on Lasers, Applications, and Technologies 2007
ホスト出版物のサブタイトルLaser-assisted Micro- and Nanotechnologies
DOI
出版ステータスPublished - 2007
外部発表はい
イベントInternational Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies - Minsk, Belarus
継続期間: 2007 5 282007 6 1

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
6732
ISSN(印刷版)0277-786X

Conference

ConferenceInternational Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies
国/地域Belarus
CityMinsk
Period07/5/2807/6/1

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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