Three-dimensional micro-channels in polymers: One-step fabrication

K. Yamasaki, S. Juodkazis, S. Matsuo, H. Misawa

研究成果: Article査読

67 被引用数 (Scopus)

抄録

We report on the femtosecond laser fabrication of micro-channels of sub-micrometer cross section recorded in polymethylmethacrylate (PMMA) films in a single processing step. Both axial lengths of an elliptical cross section smaller than 0.4 μm were achieved for a fabrication irradiance close to the dielectric breakdown of PMMA. Femtosecond pulsed irradiation was scanned along the three-dimensional (3D) patterns inside the film. Channels have a self-formed densified cladding and can be 3D stacked into any pre-designed pattern and can extend over a mm length. These features are prospective for micro-total analysis system (μ-TAS) chip fabrication, micro- or nano-fluidic studies, and photonic applications such as photonic crystals.

本文言語English
ページ(範囲)371-373
ページ数3
ジャーナルApplied Physics A: Materials Science and Processing
77
3-4
DOI
出版ステータスPublished - 2003 8 1
外部発表はい

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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