Three-dimensional micro-channels in polymers: One-step fabrication

K. Yamasaki, S. Juodkazis, Shigeki Matsuo, H. Misawa

研究成果: Article

59 引用 (Scopus)

抄録

We report on the femtosecond laser fabrication of micro-channels of sub-micrometer cross section recorded in polymethylmethacrylate (PMMA) films in a single processing step. Both axial lengths of an elliptical cross section smaller than 0.4 μm were achieved for a fabrication irradiance close to the dielectric breakdown of PMMA. Femtosecond pulsed irradiation was scanned along the three-dimensional (3D) patterns inside the film. Channels have a self-formed densified cladding and can be 3D stacked into any pre-designed pattern and can extend over a mm length. These features are prospective for micro-total analysis system (μ-TAS) chip fabrication, micro- or nano-fluidic studies, and photonic applications such as photonic crystals.

元の言語English
ページ(範囲)371-373
ページ数3
ジャーナルApplied Physics A: Materials Science and Processing
77
発行部数3-4
DOI
出版物ステータスPublished - 2003 8
外部発表Yes

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Polymers
fluidics
Fluidics
Polymethyl Methacrylate
Fabrication
fabrication
polymers
photonics
cross sections
systems analysis
Photonic crystals
Ultrashort pulses
Electric breakdown
irradiance
Photonics
micrometers
breakdown
chips
Irradiation
irradiation

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

これを引用

Three-dimensional micro-channels in polymers : One-step fabrication. / Yamasaki, K.; Juodkazis, S.; Matsuo, Shigeki; Misawa, H.

:: Applied Physics A: Materials Science and Processing, 巻 77, 番号 3-4, 08.2003, p. 371-373.

研究成果: Article

Yamasaki, K. ; Juodkazis, S. ; Matsuo, Shigeki ; Misawa, H. / Three-dimensional micro-channels in polymers : One-step fabrication. :: Applied Physics A: Materials Science and Processing. 2003 ; 巻 77, 番号 3-4. pp. 371-373.
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