TY - JOUR
T1 - Three-dimensional microfabrication by femtosecond pulses in dielectrics
AU - Kondo, Toshiaki
AU - Yamasaki, Kazuhiko
AU - Juodkazis, Saulius
AU - Matsuo, Shigeki
AU - Mizeikis, Vygantas
AU - Misawa, Hiroaki
N1 - Funding Information:
This work was partially supported by The Satellite Venture Business Laboratory (SVBL) of the University of Tokushima and by the Aerospace R&D contract No. F62562-03-P-0208 AOARD 02-35.
Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2004/4/1
Y1 - 2004/4/1
N2 - We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling.
AB - We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling.
KW - Dielectric breakdown
KW - Femtosecond laser microfabrication
KW - Micro-fabrication
KW - Nano-fabrication
KW - Polymers
KW - Polymethylmethacrylate (PMMA)
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U2 - 10.1016/j.tsf.2003.11.180
DO - 10.1016/j.tsf.2003.11.180
M3 - Conference article
AN - SCOPUS:1542740305
VL - 453-454
SP - 550
EP - 556
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
T2 - Proceedings of Symposium H on Photonic Processing of Surfaces
Y2 - 10 June 2003 through 13 June 2003
ER -