Three-dimensional microfabrication by femtosecond pulses in dielectrics

Toshiaki Kondo, Kazuhiko Yamasaki, Saulius Juodkazis, Shigeki Matsuo, Vygantas Mizeikis, Hiroaki Misawa

研究成果: Conference article

41 引用 (Scopus)


We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling.

ジャーナルThin Solid Films
出版物ステータスPublished - 2004 4 1
イベントProceedings of Symposium H on Photonic Processing of Surfaces - Strasbourg, France
継続期間: 2003 6 102003 6 13

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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  • これを引用

    Kondo, T., Yamasaki, K., Juodkazis, S., Matsuo, S., Mizeikis, V., & Misawa, H. (2004). Three-dimensional microfabrication by femtosecond pulses in dielectrics. Thin Solid Films, 453-454, 550-556.