Three-dimensional microfabrication by femtosecond pulses in dielectrics

Toshiaki Kondo; Kazuhiko Yamasaki; Saulius Juodkazis; Shigeki Matsuo; Vygantas Mizeikis; Hiroaki Misawa

doi:10.1016/j.tsf.2003.11.180

Three-dimensional microfabrication by femtosecond pulses in dielectrics

Toshiaki Kondo, Kazuhiko Yamasaki, Saulius Juodkazis, Shigeki Matsuo, Vygantas Mizeikis, Hiroaki Misawa

機械工学科

研究成果: Conference article

41 引用（Scopus）

抜粋

We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling.

元の言語	English
ページ（範囲）	550-556
ページ数	7
ジャーナル	Thin Solid Films
巻	453-454
DOI	https://doi.org/10.1016/j.tsf.2003.11.180
出版物ステータス	Published - 2004 4 1
イベント	Proceedings of Symposium H on Photonic Processing of Surfaces - Strasbourg, France 継続期間: 2003 6 10 → 2003 6 13

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

文献にアクセス

10.1016/j.tsf.2003.11.180

フィンガープリント Three-dimensional microfabrication by femtosecond pulses in dielectrics' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

これを引用

Kondo, T., Yamasaki, K., Juodkazis, S., Matsuo, S., Mizeikis, V., & Misawa, H. (2004). Three-dimensional microfabrication by femtosecond pulses in dielectrics. Thin Solid Films, 453-454, 550-556. https://doi.org/10.1016/j.tsf.2003.11.180

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title = "Three-dimensional microfabrication by femtosecond pulses in dielectrics",

abstract = "We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling.",

keywords = "Dielectric breakdown, Femtosecond laser microfabrication, Micro-fabrication, Nano-fabrication, Polymers, Polymethylmethacrylate (PMMA)",

author = "Toshiaki Kondo and Kazuhiko Yamasaki and Saulius Juodkazis and Shigeki Matsuo and Vygantas Mizeikis and Hiroaki Misawa",

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T1 - Three-dimensional microfabrication by femtosecond pulses in dielectrics

AU - Kondo, Toshiaki

AU - Yamasaki, Kazuhiko

AU - Juodkazis, Saulius

AU - Matsuo, Shigeki

AU - Mizeikis, Vygantas

AU - Misawa, Hiroaki

PY - 2004/4/1

Y1 - 2004/4/1

N2 - We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling.

AB - We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling.

KW - Dielectric breakdown

KW - Femtosecond laser microfabrication

KW - Micro-fabrication

KW - Nano-fabrication

KW - Polymers

KW - Polymethylmethacrylate (PMMA)

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JO - Thin Solid Films

JF - Thin Solid Films

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T2 - Proceedings of Symposium H on Photonic Processing of Surfaces

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