抄録
We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling.
| 元の言語 | English |
|---|---|
| ページ（範囲） | 550-556 |
| ページ数 | 7 |
| ジャーナル | Thin Solid Films |
| 巻 | 453-454 |
| DOI | |
| 出版物ステータス | Published - 2004 4 1 |
| 外部発表 | Yes |
Fingerprint
ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Condensed Matter Physics
- Surfaces and Interfaces
これを引用
Three-dimensional microfabrication by femtosecond pulses in dielectrics. / Kondo, Toshiaki; Yamasaki, Kazuhiko; Juodkazis, Saulius; Matsuo, Shigeki; Mizeikis, Vygantas; Misawa, Hiroaki.
：: Thin Solid Films, 巻 453-454, 01.04.2004, p. 550-556.研究成果: Article
}
TY - JOUR
T1 - Three-dimensional microfabrication by femtosecond pulses in dielectrics
AU - Kondo, Toshiaki
AU - Yamasaki, Kazuhiko
AU - Juodkazis, Saulius
AU - Matsuo, Shigeki
AU - Mizeikis, Vygantas
AU - Misawa, Hiroaki
PY - 2004/4/1
Y1 - 2004/4/1
N2 - We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling.
AB - We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling.
KW - Dielectric breakdown
KW - Femtosecond laser microfabrication
KW - Micro-fabrication
KW - Nano-fabrication
KW - Polymers
KW - Polymethylmethacrylate (PMMA)
UR - http://www.scopus.com/inward/record.url?scp=1542740305&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=1542740305&partnerID=8YFLogxK
U2 - 10.1016/j.tsf.2003.11.180
DO - 10.1016/j.tsf.2003.11.180
M3 - Article
AN - SCOPUS:1542740305
VL - 453-454
SP - 550
EP - 556
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
ER -