Three-dimensional microstructures created by laser microfabrication technology

Makoto Horiyama, Hong Bo Sun, Masafumi Miwa, Shigeki Matsuo, Hiroaki Misawa

研究成果: Article

13 引用 (Scopus)

抜粋

Three-dimensional microstructures with aspect ratios larger than 20 and a solidified wall with a thickness down to 2.0 μm have been fabricated by the one-photon absorption photopolymerization technique. Lateral and longitudinal spatial resolutions in a single-line scanning process of as high as 1.0 μm and 0.3 μm, respectively, are reproducible. An experimental system consisting of a common picosecond pulsed laser and an optical microscope makes laser microfabrication easy to realize, implying a broad application potential.

元の言語English
ページ(範囲)L212-L215
ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
38
発行部数2 B
DOI
出版物ステータスPublished - 1999 1 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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