Three-dimensional microstructures created by laser microfabrication technology

Makoto Horiyama, Hong Bo Sun, Masafumi Miwa, Shigeki Matsuo, Hiroaki Misawa

研究成果: Article

13 引用 (Scopus)

抄録

Three-dimensional microstructures with aspect ratios larger than 20 and a solidified wall with a thickness down to 2.0 μm have been fabricated by the one-photon absorption photopolymerization technique. Lateral and longitudinal spatial resolutions in a single-line scanning process of as high as 1.0 μm and 0.3 μm, respectively, are reproducible. An experimental system consisting of a common picosecond pulsed laser and an optical microscope makes laser microfabrication easy to realize, implying a broad application potential.

元の言語English
ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
38
発行部数2 B
出版物ステータスPublished - 1999
外部発表Yes

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Photopolymerization
Microfabrication
optical microscopes
Pulsed lasers
aspect ratio
Aspect ratio
pulsed lasers
Microscopes
Photons
spatial resolution
Scanning
microstructure
Microstructure
scanning
Lasers
photons
lasers

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

これを引用

Three-dimensional microstructures created by laser microfabrication technology. / Horiyama, Makoto; Sun, Hong Bo; Miwa, Masafumi; Matsuo, Shigeki; Misawa, Hiroaki.

:: Japanese Journal of Applied Physics, Part 2: Letters, 巻 38, 番号 2 B, 1999.

研究成果: Article

Horiyama, Makoto ; Sun, Hong Bo ; Miwa, Masafumi ; Matsuo, Shigeki ; Misawa, Hiroaki. / Three-dimensional microstructures created by laser microfabrication technology. :: Japanese Journal of Applied Physics, Part 2: Letters. 1999 ; 巻 38, 番号 2 B.
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