Three-dimensional recording by femtosecond pulses in dielectrics

Saulius Juodkazis, Toshiaki Kondo, Vygantas Mizeikis, Shigeki Matsuo, Hiroyuki Murata, Hiroaki Misawa

研究成果査読

10 被引用数 (Scopus)

抄録

Fabrication and characteristics of two-dimensional (2D) and three-dimensional (3D) periodic structures, recorded in the bulk of SU8 photoresist film by multiple-beam interference is described. Multiple beams (up to nine) were generated by a diffractive beam splitter. Recording was performed by ultrashort laser pulses with temporal width of 140 fs (FVWM) and central wavelength of 800 nm, derived from a Ti:sapphire laser. Intensity-dependent photomodification of the photoresist was due to single-photon as well as multi-photon (two and three) absorption. After the development, the exposed resist films contained free-standing 2D and 3D periodic dielectric structures with unexposed exposed regions removed by the development. Detailed examination of the samples has revealed close resemblance between their structure and the light intensity distributions in the multiple-beam interference fields, expected from the numerical calculations. Quality of the samples recorded by a single-photon absorption was lower than that of that of other samples, in particular due to poor development quality. The microfabrication method used in this work appears to be a suitable for obtaining photonic crystal templates.

本文言語English
ページ(範囲)94-107
ページ数14
ジャーナルProceedings of SPIE - The International Society for Optical Engineering
4977
DOI
出版ステータスPublished - 2003
外部発表はい
イベントPROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II - San Jose, CA, United States
継続期間: 2003 1 272003 1 30

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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