抄録
The use of laser lithography in the fabrication of large-scale, three-dimensional (3D) photonic crystals was discussed. Lithography by direct laser writing (DLW) allows recording of nearly arbitrary 3D lattices with submicrometric resolution. Self-supporting structure obtained in the SU-8 photoresist stop gaps at infrared wavelength. The samples obtained are structurally strong, sustain extended defects, and exhibit photonic stop-gaps in the infrared wavelength range of 2.0-6.0 μm.
本文言語 | English |
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ページ(範囲) | 541-545 |
ページ数 | 5 |
ジャーナル | Advanced Materials |
巻 | 17 |
号 | 5 |
DOI | |
出版ステータス | Published - 2005 3月 8 |
外部発表 | はい |
ASJC Scopus subject areas
- 材料科学(全般)
- 材料力学
- 機械工学