The use of laser lithography in the fabrication of large-scale, three-dimensional (3D) photonic crystals was discussed. Lithography by direct laser writing (DLW) allows recording of nearly arbitrary 3D lattices with submicrometric resolution. Self-supporting structure obtained in the SU-8 photoresist stop gaps at infrared wavelength. The samples obtained are structurally strong, sustain extended defects, and exhibit photonic stop-gaps in the infrared wavelength range of 2.0-6.0 μm.
|出版ステータス||Published - 2005 3月 8|
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