Ti-Al, graded Al/AlTi, and Ti-Al-N coatings prepared by supersonic Free-Jet PVD

Engineering & Materials Science

• Physical vapor deposition 99%
• Coatings 60%
• Nanoparticles 50%
• Substrates 42%
• Evaporation 40%
• Crystal structure 13%
• Deposition rates 13%
• Partial pressure 12%
• Intermetallics 10%
• Defects 6%

Physics & Astronomy

• free jets 100%
• coatings 54%
• nanoparticles 34%
• chambers 24%
• evaporation 23%
• evaporation rate 12%
• partial pressure 9%
• coating 9%
• intermetallics 9%
• crystal structure 7%
• preparation 7%
• synthesis 7%
• atmospheres 7%
• defects 5%

Chemical Compounds

• Coating Agent 48%
• Liquid Film 39%
• Evaporation 26%
• Nanoparticle 25%
• Rate of Evaporation 14%
• Intermetallic Compound 10%
• Partial Pressure 9%
• Velocity 8%
• Crystal Structure 5%