Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure

Hokuto Yamane, Sumito Nagasawa

研究成果: Conference contribution

抄録

In this paper we propose a trajectory control method for a MEMS falling object as shown in Figure 1. The MEMS falling object is consisted of two units, an autorotation part and a non-rotation part. The autorotation part keeps its attitude stable with the gyro-effect of the autorotation phenomenon. The non-rotation part keeps a non-rotation state by using the air breaking boards. This non-rotation part controls its falling trajectory and the scattering region. By using large falling objects, aerodynamics of the falling object was characterized, e.g. falling speed, rotational speed, etc. Then the MEMS falling object was designed considering with this aerodynamics. The MEMS falling object was fabricated with a method of the SU-8 multi-layer structure. A MEMS autorotation part whose wing length is 6mm in diameter rotates at 4,800 rpm in the wind-tunnel successfully.

本文言語English
ホスト出版物のタイトル2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
出版社Institute of Electrical and Electronics Engineers Inc.
ページ308-311
ページ数4
February
ISBN(電子版)9781479979554
DOI
出版ステータスPublished - 2015 2 26
イベント2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
継続期間: 2015 1 182015 1 22

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
番号February
2015-February
ISSN(印刷版)1084-6999

Other

Other2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
国/地域Portugal
CityEstoril
Period15/1/1815/1/22

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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