Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure

Hokuto Yamane, Sumito Nagasawa

研究成果: Conference contribution

抜粋

In this paper we propose a trajectory control method for a MEMS falling object as shown in Figure 1. The MEMS falling object is consisted of two units, an autorotation part and a non-rotation part. The autorotation part keeps its attitude stable with the gyro-effect of the autorotation phenomenon. The non-rotation part keeps a non-rotation state by using the air breaking boards. This non-rotation part controls its falling trajectory and the scattering region. By using large falling objects, aerodynamics of the falling object was characterized, e.g. falling speed, rotational speed, etc. Then the MEMS falling object was designed considering with this aerodynamics. The MEMS falling object was fabricated with a method of the SU-8 multi-layer structure. A MEMS autorotation part whose wing length is 6mm in diameter rotates at 4,800 rpm in the wind-tunnel successfully.

元の言語English
ホスト出版物のタイトルProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
出版者Institute of Electrical and Electronics Engineers Inc.
ページ308-311
ページ数4
2015-February
エディションFebruary
DOI
出版物ステータスPublished - 2015 2 26
イベント2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
継続期間: 2015 1 182015 1 22

Other

Other2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Portugal
Estoril
期間15/1/1815/1/22

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

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  • これを引用

    Yamane, H., & Nagasawa, S. (2015). Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure. : Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (February 版, 巻 2015-February, pp. 308-311). [7050950] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7050950