Trends of Interlayer Dielectric Film Technologies in Ultra-Large-Scale Integrated Circuits (ULSIs)

T.Homma T.Homma, Tetsuya Homma

研究成果: Article

元の言語English
ジャーナルDefault journal
出版物ステータスPublished - 1997 11 21

これを引用

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title = "Trends of Interlayer Dielectric Film Technologies in Ultra-Large-Scale Integrated Circuits (ULSIs)",
author = "T.Homma T.Homma and Tetsuya Homma",
year = "1997",
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language = "English",
journal = "Default journal",

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AU - T.Homma, T.Homma

AU - Homma, Tetsuya

PY - 1997/11/21

Y1 - 1997/11/21

M3 - Article

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