Tribological properties of physical vapor deposited ZrN thin films

Atsushi Mitsuo, Tatsuhiko Aizawa

研究成果: Conference contribution

抄録

Zirconium nitride thin films were prepared by ion-beam assisted deposition (IBAD) on silicon substrates. The films were synthesized by depositing zirconium vapor simultaneous irradiation with nitrogen ions. Transport ratio of Zr to N was varied between 1.0 and 3.0, and N-ion beam energy was kept 0.5 and 1.0 keV. The films were characterized by X-ray diffraction and X-ray photoelectron spectroscopy. Hardness of the films was investigated with a nano-indentation tester. The films were tested for friction and wear on a ball-and-disk tribometer, under 5 N load and 10 mm/s relative sliding speed with steel balls as the counter material. The hardness of the films increased with decreasing the transport ratio. Tribological properties of films were compared with post chlorine-ion implanted films.

本文言語English
ホスト出版物のタイトルInternational Surface Engineering Congress - Proceedings of the 1st Congress
ページ127-130
ページ数4
出版ステータスPublished - 2003 12 1
イベントInternational Surface Engineering Congress - Proceedings of the 1st Congress - Colombus, OH, United States
継続期間: 2002 10 72002 10 10

出版物シリーズ

名前International Surface Engineering Congress - Proceedings of the 1st Congress

Conference

ConferenceInternational Surface Engineering Congress - Proceedings of the 1st Congress
国/地域United States
CityColombus, OH
Period02/10/702/10/10

ASJC Scopus subject areas

  • 工学(全般)

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