We have successfully fabricated nano-dots containing tungsten or gold from metal-organic gas sources by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size fabricated from W(CO)6 is ∼1.5 nm in diameter, which is close to the theoretical resolution limit.
ASJC Scopus subject areas
- 化学 (全般)