Ultimate sized nano-dots formed by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka, M. Shimojo, M. Han, K. Mitsuishi, K. Furuya

研究成果: Article

49 引用 (Scopus)

抜粋

We have successfully fabricated nano-dots containing tungsten or gold from metal-organic gas sources by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size fabricated from W(CO)6 is ∼1.5 nm in diameter, which is close to the theoretical resolution limit.

元の言語English
ページ(範囲)261-264
ページ数4
ジャーナルSurface and Interface Analysis
37
発行部数2
DOI
出版物ステータスPublished - 2005 2 1
外部発表Yes

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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