Ultimate sized nano-dots formed by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

Engineering & Materials Science

• Ultrahigh vacuum 100%
• Partial pressure 75%
• Electron beams 75%
• Gold 68%
• Tungsten 68%
• Irradiation 65%
• Electron microscopes 60%
• Particle size 60%
• Metals 40%
• Gases 36%

Physics & Astronomy

• ultrahigh vacuum 63%
• electron microscopes 50%
• electron beams 45%
• partial pressure 30%
• tungsten 27%
• gold 24%
• irradiation 20%
• gases 16%
• metals 16%

Chemical Compounds

• Vacuum 50%
• Electron Particle 34%
• Partial Pressure 30%
• Tungsten 29%
• Gas 16%
• Time 11%