TY - GEN
T1 - Ultralow impedance evaluation system of wideband frequency for power distribution network of decoupling capacitor embedded substrates
AU - Kikuchi, Katsuya
AU - Takemura, Koichi
AU - Ueda, Chihiro
AU - Shimada, Osamu
AU - Gomyo, Toshio
AU - Takeuchi, Yukiharu
AU - Okubo, Toshikazu
AU - Baba, Kazuhiro
AU - Aoyagi, Masahiro
AU - Sudo, Toshio
AU - Otsuka, Kanji
PY - 2009
Y1 - 2009
N2 - We developed an impedance analyzer system with a wide frequency range for evaluating ultralow impedance. The four-point impedance measurement technique is introduced using this system. This impedance measurement can be reliably and accurately carried out by a four-point technique where one pair of contacts is used to inject a signal into the device under test (DUT), and a second pair of contacts is used to sense the resulting signal across the DUT. As a result, an evaluation system for the tens of micro-ohms of trans-impedance Z21 in the frequency range of 10 Hz to 40 GHz can be realized. By using two microwave contact probes, PDN impedance evaluation with contacted pads is realized. Therefore, the PDN impedance can be measured directly without the connectors during the measurement. Moreover, it is expected that the accurate and wideband impedance evaluation of a substrate with an electromagnetic band gap (EBG) structure can be realized.
AB - We developed an impedance analyzer system with a wide frequency range for evaluating ultralow impedance. The four-point impedance measurement technique is introduced using this system. This impedance measurement can be reliably and accurately carried out by a four-point technique where one pair of contacts is used to inject a signal into the device under test (DUT), and a second pair of contacts is used to sense the resulting signal across the DUT. As a result, an evaluation system for the tens of micro-ohms of trans-impedance Z21 in the frequency range of 10 Hz to 40 GHz can be realized. By using two microwave contact probes, PDN impedance evaluation with contacted pads is realized. Therefore, the PDN impedance can be measured directly without the connectors during the measurement. Moreover, it is expected that the accurate and wideband impedance evaluation of a substrate with an electromagnetic band gap (EBG) structure can be realized.
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U2 - 10.1109/3DIC.2009.5306526
DO - 10.1109/3DIC.2009.5306526
M3 - Conference contribution
AN - SCOPUS:70549105982
SN - 9781424445127
T3 - 2009 IEEE International Conference on 3D System Integration, 3DIC 2009
BT - 2009 IEEE International Conference on 3D System Integration, 3DIC 2009
T2 - 2009 IEEE International Conference on 3D System Integration, 3DIC 2009
Y2 - 28 September 2009 through 30 September 2009
ER -