Versatile proton beam writing system with stage movement

Phi T. Nguyen, Nobukazu Kawakami, Tadahiro Hasegawa, Hiroyuki Nishikawa

研究成果: Conference contribution

抄録

We propose a Proton beam writing (PBW) system with an auto scanning program and stage movement in order to entirely solve the narrow scanning and low design problems of PBW technique. We developed the auto scanning program to transform from 3D CAD (Computer Aided Design) data to scanning pattern data which enables to pattern the complex structures more accurate and much faster. On the other hand, we combined the XY-stage control and electrostatic scanning to expand the fabrication area of our previous system from micrometers range to centimeters range which able to fabricate the whole microstructures network by one exposing time. Our PBW system provides a versatile tool with the unique advantages of proton beam for 3D machining, particularly useful for high-aspect ratio and complicated microstructures.

本文言語English
ホスト出版物のタイトルNANOMED 2012 - 6th IEEE International Conference on Nano/Molecular Medicine and Engineering
ページ51-55
ページ数5
DOI
出版ステータスPublished - 2012 12 1
イベント6th IEEE International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2012 - Bangkok, Thailand
継続期間: 2012 11 42012 11 7

出版物シリーズ

名前IEEE International Conference on Nano/Molecular Medicine and Engineering, NANOMED
ISSN(印刷版)2159-6964
ISSN(電子版)2159-6972

Conference

Conference6th IEEE International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2012
国/地域Thailand
CityBangkok
Period12/11/412/11/7

ASJC Scopus subject areas

  • 分子医療
  • 生体医工学
  • 微生物学(医療)

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