Vibration based energy harvester employing ZnO film on the stainless steel substrate

Shota Hosokawa, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

研究成果: Article査読

3 被引用数 (Scopus)

抄録

We developed the energy harvester employing piezoelectric zinc oxide (ZnO) thin film for application to large vibrational amplitude. To ensure the fracture toughness, stainless steel (SUS304) was employed as a substrate. Also, to prevent the electrical breakdown due to the pinholes in the ZnO film, conformal silicon oxide (SiO2) layer was inserted between the ZnO film and top electrode. By inserting the SiO2 layer, power efficiency was much enhanced. As a result, a generated power of 150 nW was obtained when acceleration and load resistance were 0.7 m/s2 and 670 k, respectively.

本文言語English
ページ(範囲)126-127
ページ数2
ジャーナルIEEJ Transactions on Sensors and Micromachines
133
4
DOI
出版ステータスPublished - 2013
外部発表はい

ASJC Scopus subject areas

  • 機械工学
  • 電子工学および電気工学

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