TY - JOUR
T1 - Vibration based energy harvester employing ZnO film on the stainless steel substrate
AU - Hosokawa, Shota
AU - Hara, Motoaki
AU - Oguchi, Hiroyuki
AU - Kuwano, Hiroki
PY - 2013
Y1 - 2013
N2 - We developed the energy harvester employing piezoelectric zinc oxide (ZnO) thin film for application to large vibrational amplitude. To ensure the fracture toughness, stainless steel (SUS304) was employed as a substrate. Also, to prevent the electrical breakdown due to the pinholes in the ZnO film, conformal silicon oxide (SiO2) layer was inserted between the ZnO film and top electrode. By inserting the SiO2 layer, power efficiency was much enhanced. As a result, a generated power of 150 nW was obtained when acceleration and load resistance were 0.7 m/s2 and 670 k, respectively.
AB - We developed the energy harvester employing piezoelectric zinc oxide (ZnO) thin film for application to large vibrational amplitude. To ensure the fracture toughness, stainless steel (SUS304) was employed as a substrate. Also, to prevent the electrical breakdown due to the pinholes in the ZnO film, conformal silicon oxide (SiO2) layer was inserted between the ZnO film and top electrode. By inserting the SiO2 layer, power efficiency was much enhanced. As a result, a generated power of 150 nW was obtained when acceleration and load resistance were 0.7 m/s2 and 670 k, respectively.
KW - Energy harvester
KW - Stainless
KW - ZnO
UR - http://www.scopus.com/inward/record.url?scp=84877080535&partnerID=8YFLogxK
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U2 - 10.1541/ieejsmas.133.126
DO - 10.1541/ieejsmas.133.126
M3 - Article
AN - SCOPUS:84877080535
VL - 133
SP - 126
EP - 127
JO - IEEJ Transactions on Sensors and Micromachines
JF - IEEJ Transactions on Sensors and Micromachines
SN - 1341-8939
IS - 4
ER -